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Indentation-derived elastic modulus of multilayer thin films: Effect of unloading-induced plasticity

Published online by Cambridge University Press:  13 August 2015

Ryan D. Jamison  and
Yu-Lin Shen
Ryan D. Jamison*
Affiliation:
Component Science & Mechanics, Sandia National Laboratories, Albuquerque, New Mexico 87185-0346, USA
Yu-Lin Shen
Affiliation:
Department of Mechanical Engineering, The University of New Mexico, Albuquerque, New Mexico 87131, USA
*
a)Address all correspondence to this author. e-mail: rdjamis@sandia.gov
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Abstract

Nanoindentation is useful for evaluating the mechanical properties, such as elastic modulus, of multilayer thin film materials. A fundamental assumption in the derivation of the elastic modulus from nanoindentation is that the unloading process is purely elastic. In this work, the validity of elastic assumption as it applies to multilayer thin films is studied using the finite element method. The elastic modulus and hardness from the model system are compared to experimental results to show validity of the model. Plastic strain is shown to increase in the multilayer system during the unloading process. The indentation-derived modulus of a monolayer material shows no dependence on unloading plasticity while the modulus of the multilayer system is dependent on unloading-induced plasticity. Lastly, the cyclic behavior of the multilayer thin film is studied in relation to the influence of unloading-induced plasticity. It is found that several cycles are required to minimize unloading-induced plasticity.

Keywords

nanoindentationelastic propertiesfilm
Type
Articles
Information
Journal of Materials Research , Volume 30 , Issue 15 , 14 August 2015 , pp. 2279 - 2290
Copyright
Copyright © Materials Research Society 2015 

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References

REFERENCES

Cahn, R.W.: The Coming of Materials Science, 5th ed. (Pergamon Press, Oxford, England, 2001).Google Scholar
Laraia, V.J. and Heuer, A.H.: Novel composite microstructure and mechanical-behavior of mollusk shell. J. Am. Ceram. Soc. 72(11), 2177 (1989).Google Scholar
Ko, S.W., Dechakupt, T., Randall, C.A., Trolier-McKinstry, S., Randall, M., and Tajuddin, A.: Chemical solution deposition of copper thin films and integration into a multilayer capacitor structure. J. Electroceram. 24(3), 161 (2010).Google Scholar
Koseki, T., Inoue, J., and Nambu, S.: Development of multilayer steels for improved combinations of high strength and high ductility. Mater. Trans. 55(2), 227 (2014).Google Scholar
Sahin, Y.: The effects of various multilayer ceramic coatings on the wear of carbide cutting tools when machining metal matrix composites. Surf. Coat. Technol. 199(1), 112 (2005).CrossRefGoogle Scholar
Ghalandari, L. and Moshksar, M.M.: High-strength and high-conductive Cu/Ag multilayer produced by ARB. J. Alloys Compd. 506(1), 172 (2010).CrossRefGoogle Scholar
Voevodin, A.A., Schneider, J.M., Rebholz, C., and Matthews, A.: Multilayer composite ceramic-metal-DLC coatings for sliding wear applications. Tribol. Int. 29(7), 559 (1996).CrossRefGoogle Scholar
Schmitt, M.P., Rai, A.K., Bhattacharya, R., Zhu, D.M., and Wolfe, D.E.: Multilayer thermal barrier coating (TBC) architectures utilizing rare earth doped YSZ and rare earth pyrochlores. Surf. Coat. Technol. 251, 56 (2014).CrossRefGoogle Scholar
Windt, D.L. and Bellotti, J.A.: Performance, structure, and stability of SiC/Al multilayer films for extreme ultraviolet applications. Appl. Opt. 48(26), 4932 (2009).CrossRefGoogle ScholarPubMed
Ziani, A., Delmotte, F., Le Paven-Thivet, C., Meltchakov, E., Jerome, A., Roulliay, M., Bridou, F., and Gasc, K.: Ion beam sputtered aluminum based multilayer mirrors for extreme ultraviolet solar imaging. Thin Solid Films 552, 62 (2014).Google Scholar
Lotfian, S., Rodriguez, M., Yazzie, K.E., Chawla, N., Llorca, J., and Molina-Aldareguia, J.M.: High temperature micropillar compression of Al/SiC nanolaminates. Acta Mater. 61, 4439 (2013).CrossRefGoogle Scholar
Knorr, I., Cordero, N.M., Lilleodden, E.T., and Volkert, C.A.: Mechanical behavior of nanoscale Cu/PdSi multilayers. Acta Mater. 61, 4984 (2013).CrossRefGoogle Scholar
Bhattacharyya, D., Mara, N.A., Dickerson, P., Hoagland, R.G., and Misra, A.: Compressive flow behavior of Al–TiN multilayers at nanometer scale layer thickness. Acta Mater. 59(10), 3804 (2011).CrossRefGoogle Scholar
Deng, X., Cleveland, C., Chawla, N., Karcher, T., Koopman, M., and Chawla, K.K.: Nanoindentation behavior of nanolayered metal ceramic composites. J. Mater. Eng. Perform. 14(4), 417 (2005).CrossRefGoogle Scholar
Romero, J., Lousa, A., Martinez, E., and Esteve, J.: Nanometric chromium/chromium carbide multilayers for tribological applications. Surf. Coat. Technol. 163, 392 (2003).CrossRefGoogle Scholar
Phillips, M.A., Clemens, B.M., and Nix, W.D.: Microstructure and nanoindentation hardness of Al/Al3Sc multilayers. Acta Mater. 51(11), 3171 (2003).CrossRefGoogle Scholar
Wang, Y-C., Misra, A., and Hoagland, R.G.: Fatigue properties of nanoscale Cu/Nb multilayers. Scr. Mater. 54, 1593 (2006).Google Scholar
Budiman, A.S., Han, S-M., Li, N., Wei, Q-M., Dickerson, P., Tamura, N., Kunz, M., and Misra, A.: Plasticity in the nanoscale Cu/Nb single-crystal multilayers as revealed by synchrotron Laue x-ray microdiffraction. J. Mater. Res. 27(3), 599 (2012).Google Scholar
Oliver, W.C. and Pharr, G.M.: An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments. J. Mater. Res. 7, 1564 (1992).Google Scholar
Sneddon, I.N.: The relation between load and penetration in the axisymmetric Boussinesq problem for a punch of arbitrary profile. Int. J. Eng. Sci. 3, 47 (1965).CrossRefGoogle Scholar
Galanov, B.A., Grigor'ev, O.N., Mil'man, Y.V., and Ragozin, I.P.: Determination of the hardness and Young's modulus from the depth of penetration of a pyramidal indentor. Strength Mater. 15(11), 1624 (1983).CrossRefGoogle Scholar
Doerner, M.F. and Nix, W.D.: A method for interpreting the data from depth-sensing indentation instruments. J. Mater. Res. 1, 601 (1986).CrossRefGoogle Scholar
Pharr, G.M. and Bolshakov, A.: Understanding nanoindentation unloading curves. J. Mater. Res. 17, 2660 (2002).Google Scholar
Bolshakov, A., Oliver, W.C., and Pharr, G.M.: An explanation for the shape of nanoindentation unloading curves based on finite element simulation. MRS Proc. 356, 675 (1994).Google Scholar
Hay, J.C., Bolshakov, A., and Pharr, G.M.: A critical examination of the fundamental relations used in the analysis of nanoindentation data. J. Mater. Res. 14, 2296 (1999).Google Scholar
Oliver, W.C. and Pharr, G.M.: Measurement of hardness and elastic modulus by instrumented indentation: Advances in understanding and refinements to methodology. J. Mater. Res. 19, 3 (2004).Google Scholar
Tang, G., Shen, Y-L., Singh, D.R.P., and Chawla, N.: Indentation behavior of metal-ceramic multillayers at the nanoscale: Numerical analysis and experimental verification. Acta Mater. 58, 2033 (2010).Google Scholar
Wen, F.-L. and Shen, Y-L.: Plastic deformation in multilayered thin films during indentation unloading: A modeling analysis incorporating viscoplastic response. Mech. Time-Depend. Mater. 15, 277 (2011).Google Scholar
Shen, Y-L., Blada, C.B., Williams, J.J., and Chawla, N.: Cyclic indentation behavior of metal–ceramic nanolayered composites. Mater. Sci. Eng., A 557, 119 (2012).CrossRefGoogle Scholar
Chawla, N., Singh, D.R.P., Shen, Y-L., Tang, G., and Chawla, K.K.: Indentation mechanics and fracture behavior of metal/ceramic nanolaminate composites. J. Mater. Sci. 43(13), 4383 (2008).CrossRefGoogle Scholar
Fischer-Cripps, A.C.: Nanoindentation, 1st ed. (Springer, New York, USA, 2002).Google Scholar
Lide, D.R.: Handbook of Chemistry and Physics, 76th ed. (CRC, Flordia, USA, 1995).Google Scholar
Bucaille, J.L., Stauss, S., Schwaller, P., and Michler, J.: A new technique to determine the elastoplastic properties of thin metallic films using sharp indenters. Thin Solid Films 447, 239 (2004).Google Scholar
Deng, X., Chawla, N., Chawla, K.K., Koopman, M., and Chu, J.P.: Mechanical behavior of multilayered nanoscale metal-ceramic composites. Adv. Eng. Mater. 7(12), 1099 (2005).CrossRefGoogle Scholar
Sun, P.L., Chu, J.P., Lin, T.Y., Shen, Y-L., and Chawla, N.: Characterization of nanoindentation damage in metal/ceramic multilayered films by transmission electron microscopy (TEM). Mater. Sci. Eng., A 257, 2985 (2010).Google Scholar
Tang, G., Shen, Y-L., Singh, D.R.P., and Chawla, N.: Analysis of indentation-derived effective elastic modulus of metal-ceramic multilayers. Int. J. Mech. Mater. Des. 4, 391 (2008).Google Scholar
Shen, Y-L.: Constrained Deformation of Materials (Springer, New York, USA, 2010).CrossRefGoogle Scholar
Singh, D.R.P., Chawla, N., and Shen, Y-L.: Focused ion beam (FIB) tomography of nanoindentation damage in nanoscale metal/ceramic multilayers. Mater. Charact. 61(4), 481 (2010).CrossRefGoogle Scholar
Jamison, R.D. and Shen, Y-L.: Indentation and overall compression behavior of multilayered thin-film composites: Effect of undulating layer geometry. J. Compos. Mater. doi: 10.1177/0021998315576768, Published online 19 March 2015.CrossRefGoogle Scholar
Oliver, W.C. and Pharr, G.M.: Nanoindentation in materials research: Past, present, and future. MRS Bull. 35(11), 897 (2010).Google Scholar
Suresh, S.: Fatigue of Materials, 2nd ed. (Cambridge University Press, Cambridge, England, 1998).CrossRefGoogle Scholar
Feng, G., Budiman, A.S., Nix, W.D., Tamura, N., and Patel, J.R.: Indentation size effects in single crystal copper as revealed by synchrotron x-ray microdiffraction. J. Appl. Phys. 104, 043501 (2008).Google Scholar
Budiman, A.S., Narayanan, K.R., Berla, L.A., Li, N., Dickerson, P., Wang, J., Tamura, N., Kunz, M., Nix, W.D., and Misra, A.: Plasticity evolution in nanoscale Cu/Nb single crystal multilayers as revealed by synchrotron X-ray microdiffraction. Mater. Sci. Eng., A 635, 6 (2015).Google Scholar