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Influence of in-process copper incorporation on the quality of diamond-like carbon films deposited by pulsed laser deposition technique

Published online by Cambridge University Press:  31 January 2011

S. J. Dikshit ,
Pramada Lele ,
S.B. Ogale  and
S. T. Kshirsagar
S. J. Dikshit
Affiliation:
Center for Advanced Studies in Materials Science and Solid State Physics, Department of Physics, University of Poona, Pune-411 007, India
Pramada Lele
Affiliation:
Center for Advanced Studies in Materials Science and Solid State Physics, Department of Physics, University of Poona, Pune-411 007, India
S.B. Ogale
Affiliation:
Center for Advanced Studies in Materials Science and Solid State Physics, Department of Physics, University of Poona, Pune-411 007, India
S. T. Kshirsagar
Affiliation:
National Chemical Laboratory, Pashan, Pune-411 008, India
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Abstract

Copper-incorporated carbon films have been prepared on Si(100) and Corning (7059) glass substrates by the pulsed excimer laser deposition technique using KrF radiation (λ = 248 nm). Cold-pressed composite pellets, having compositions from 2 at. % to 11 at. % copper in carbon, were used as targets for ablation. Good quality, scratch-proof films were obtained at a laser energy density of 2−3 J/cm2 and a substrate temperature of 50 °C. The films were characterized by x-ray diffraction (XRD), Raman spectroscopy, x-ray photoelectron spectroscopy (XPS), UV-visible spectrometry, ellipsometry, and four-point probe resistivity measurements. Under similar deposition conditions, films obtained from composite targets of lower copper concentration are seen to have better diamond-like character as compared to those obtained from a pure graphite target. At such low concentrations, copper is seen to cluster in the form of nanoparticles. As the copper concentration increases in the films, they tend to acquire disordered graphitic network with degraded DLC characteristics, and the size of copper agglomerates increases from about 5 nm (for the 2 at. % case) to 85 nm (for the 11 at. % case). It is seen that an increase in the copper content leads to modifications in the carbon network, additional interband transitions, and reduction of the band gap.

Type
Articles
Information
Journal of Materials Research , Volume 11 , Issue 9 , September 1996 , pp. 2236 - 2241
Copyright
Copyright © Materials Research Society 1996

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