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Influence of the substrate bias on the size and thermal stability of grains in magnetron-sputtered nanocrystalline Ag films

Published online by Cambridge University Press:  01 April 2005

K. Pagh Almtoft ,
J. Bøttiger ,
J. Chevallier ,
N. Schell  and
R.M.S. Martins
K. Pagh Almtoft
Affiliation:
Department of Physics and Astronomy, University of Aarhus, 8000 Aarhus C, Denmark
J. Bøttiger*
Affiliation:
Department of Physics and Astronomy, University of Aarhus, 8000 Aarhus C, Denmark
J. Chevallier
Affiliation:
Department of Physics and Astronomy, University of Aarhus, 8000 Aarhus C, Denmark
N. Schell
Affiliation:
Institute of Ion Beam Physics and Materials Research, Forschungszentrum Rossendorf, D-01314 Dresden, Germany
R.M.S. Martins
Affiliation:
Institute of Ion Beam Physics and Materials Research, Forschungszentrum Rossendorf, D-01314 Dresden, Germany
*
a) Address all correspondence to this author. e-mail: bottiger@phys.au.dk
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Abstract

The nanostructural evolution during heat treatments of direct-current magnetron-sputtered Ag films, deposited at room temperature at different substrate bias voltages, was experimentally studied. A growth chamber equipped with a magnetron and Kapton windows for in-situ x-ray diffraction was mounted on a six-circle goniometer at a synchrotron beam line. Bragg–Brentano x-ray diffraction was used to monitor the (111) Bragg peak during thermal annealing of the Ag films. In addition, to investigate the 〈111〉 fiber texture, one-dimensional pole figures were measured ex situ. The thermal stability of the nanostructure was sensitively dependent on the substrate bias voltage. Increasing the bias voltage resulted in significantly lower rates of grain growth, which we ascribe mainly to the formation of Ar bubbles. Furthermore, the grain size in the as-deposited films decreased with increasing bias voltage while the width of the one-dimensional pole figures increased.

Keywords

MicrostructureSputteringX-ray diffraction
Type
Research Article
Information
Journal of Materials Research , Volume 20 , Issue 4 , April 2005 , pp. 1071 - 1080
Copyright
Copyright © Materials Research Society 2005

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