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Inorganic islands on a highly stretchable polyimide substrate

Published online by Cambridge University Press:  31 January 2011

Jeong-Yun Sun ,
Nanshu Lu ,
Juil Yoon ,
Kyu-Hwan Oh ,
Zhigang Suo  and
Joost J. Vlassak
Jeong-Yun Sun
Affiliation:
Department of Material Science and Engineering, Seoul National University, Seoul 151-742, South Korea; and School of Engineering and Applied Sciences, Harvard University, Cambridge, Massachusetts 02138
Nanshu Lu
Affiliation:
School of Engineering and Applied Sciences, Harvard University, Cambridge, Massachusetts 02138
Juil Yoon
Affiliation:
Department of Mechanical Systems Engineering, Hansung University, Seoul 136-792, South Korea
Kyu-Hwan Oh
Affiliation:
Department of Material Science and Engineering, Seoul National University, Seoul 151-742, South Korea
Zhigang Suo
Affiliation:
Department of Material Science and Engineering, Seoul National University, Seoul 151-742, South Korea; and School of Engineering and Applied Sciences, Harvard University, Cambridge, Massachusetts 02138
Joost J. Vlassak*
Affiliation:
School of Engineering and Applied Sciences, Harvard University, Cambridge, Massachusetts 02138
*
a) Address all correspondence to this author. email: vlassak@esag.deas.harvard.edu
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Abstract

For a flexible electronic device integrating inorganic materials on a polymer substrate, the polymer can deform substantially, but the inorganic materials usually fracture at small strains. This paper describes an approach to make such a device highly stretchable. A polyimide substrate is first coated with a thin layer of an elastomer, on top of which SiNx islands are fabricated. When the substrate is stretched to a large strain, the SiNx islands remain intact. Calculations confirm that the elastomer reduces the strain in the SiNx islands by orders of magnitude.

Keywords

Electronic structureFractureThin film
Type
Articles
Information
Journal of Materials Research , Volume 24 , Issue 11 , November 2009 , pp. 3338 - 3342
Copyright
Copyright © Materials Research Society 2009

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