Hostname: page-component-cd9895bd7-hc48f Total loading time: 0 Render date: 2024-12-28T00:01:48.491Z Has data issue: false hasContentIssue false
  • English
  • Français

Room temperature copolymerization to improve the thermal and dielectric properties of polyxylylene thin films by chemical vapor deposition

Published online by Cambridge University Press:  03 March 2011

Justin F. Gaynor  and
Seshu B. Desu
Justin F. Gaynor
Affiliation:
Department of Materials Science and Engineering, Virginia Polytechnic Institute and State University, Blacksburg, Virginia 24061-0237
Seshu B. Desu*
Affiliation:
Department of Materials Science and Engineering, Virginia Polytechnic Institute and State University, Blacksburg, Virginia 24061-0237
*
a)Author to whom correspondence should be addressed.
Get access

Abstract

Polyxylylene thin films grown by chemical vapor deposition (CVD) have long been utilized for uniform, pinhole-free conformal coatings. Homopolymer films are highly crystalline and have a glass transition temperature around room temperature. We show room temperature copolymerization with previously untested comonomers during the CVD process. Samples were studied with wavelength dispersive analysis, FTIR, scanning variable angle ellipsometry, and x-ray diffraction. Copolymerizing chloro-p-xylylene with perfluoro-octyl methacrylate results in dielectric constants at optical frequencies as low as 2.19, compared to 2.68 for the homopolymer. Copolymerizing p-xylylene with 4-vinylbiphenyl resulted in films whose onset of weight loss in TGA measurements was 450 °C, compared to 270 °C for the homopolymer.

Type
Articles
Information
Journal of Materials Research , Volume 9 , Issue 12 , December 1994 , pp. 3125 - 3130
Copyright
Copyright © Materials Research Society 1994

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1Sochilin, V., Mailyan, K., Aleksandrova, L., Nikolaev, A., Pebalk, A., and Kardash, I., Plenum Publishing document 0012-5008/91/00070165, translated from Doklady Akademii Nauk SSSR 319(1), 173–176 (July 1991).Google Scholar
2Gaynor, J. and Desu, S., in Poly crystalline Thin Films, edited by Parker, M., Barmak, K., Floro, J., Sinclair, R., and Smith, D. (Mater. Res. Soc. Symp. Proc. 343, Pittsburgh, PA, 1994).Google Scholar
3Beach, W., Lee, C., Bassett, D., Austin, T., and Olson, R., Encyclopedia of Polymer Science (John Wiley and Sons Interscience, New York, 1984), Vol. 17, pp. 990–1024.Google Scholar
4Errede, L. and Swarc, M., Quarterly Review of the Chemical Society 12(4), 301–320 (1958).Google Scholar
5Swarc, M., Discuss. Faraday Soc. 2, 46 (1947).CrossRefGoogle Scholar
6Beach, W. and Austin, T., 2nd Int. SAMPE Electronics Conf., June (1988), pp. 25–35.Google Scholar
7Gorham, W., J. Poly. Sci. A-l 4, 3037–3039 (1966).Google Scholar
8Bachman, B, 1st Int. SAMPE Electronics Conf. (1987), pp 431–440Google Scholar
9Joesten, B., J. Appl. Poly. Sci. 18, 439–448 (1974).CrossRefGoogle Scholar