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Synthesis of metal oxide thin films by liquid-phase deposition method

Published online by Cambridge University Press:  31 January 2011

Shigehito Deki  and
Yoshifumi Aoi
Shigehito Deki
Affiliation:
Department of Chemical Science & Engineering, Faculty of Engineering, Kobe University, Rokkodai-cho, Nada-ku, Kobe 657, Japan
Yoshifumi Aoi
Affiliation:
Department of Materials Chemistry, Faculty of Science and Technology, Ryukoku University, Seta, Otsu 520–21, Japan
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Abstract

A novel wet process to synthesize metal oxide thin films has been developed. The process is called the Liquid-Phase Deposition (LPD) method. In this method, metal oxide or hydroxide thin films are formed on the substrate through the ligand-exchanging (hydrolysis) equilibrium reaction of metal-fluoro complex species and the F− consumption reaction of a F− scavenger. The LPD method is a unique soft solution process, and is performed by very simple procedures. In this paper, we develop a method of preparing composite oxide thin films, Pt-dispersed titanium oxide, and iron-nickel binary oxide thin films.

Type
Articles
Information
Journal of Materials Research , Volume 13 , Issue 4 , April 1998 , pp. 883 - 890
Copyright
Copyright © Materials Research Society 1998

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References

REFERENCES

1.Nagayama, H., Honda, H., and Kawahara, H., J. Electrochem. Soc. 135, 2013 (1988).CrossRefGoogle Scholar
2.Hishinuma, A., Goda, T., Kitaoka, M., Hayashi, S., and Kawahara, H., Appl. Surf. Sci. 48/49, 405 (1991).CrossRefGoogle Scholar
3.Awazu, K., Kawazoe, H., and Seki, K., J. Non-Cryst. Solids 151, 102 (1992).CrossRefGoogle Scholar
4.Homma, T., Katoh, T., Yamada, Y., and Murao, Y., J. Electrochem. Soc. 140, 2410 (1993).CrossRefGoogle Scholar
5.Chou, J. S. and Lee, S. C., J. Electrochem. Soc. 141, 3214 (1994).CrossRefGoogle Scholar
6.Yeh, C. F., Chen, C. L., Lur, W., and Yen, P. W., Appl. Phys. Lett. 66, 938 (1995).CrossRefGoogle Scholar
7.Nagamura, T. and Shimizu, H., Mol. Cryst. Liq. Cryst. A 267, 169 (1995).CrossRefGoogle Scholar
8.Deki, S., Aoi, Y., Hiroi, O., and Kajinami, A., Chem. Lett., 433 (1996).Google Scholar
9.Deki, S., Aoi, Y., Miyake, Y., Gotoh, A., and Kajinami, A., Mater. Res. Bull. 31, 1399 (1996).Google Scholar
10.Deki, S., Aoi, Y., Yanagimoto, H., Ishii, K., Akamatsu, K., Mizuhata, M., and Kajinami, A., J. Mater. Chem. 6, 1879 (1996).CrossRefGoogle Scholar
11.Deki, S., Aoi, Y., Asaoka, Y., Kajinami, A., and Mizuhata, M., J. Mater. Chem. 7, 733 (1997).CrossRefGoogle Scholar
12.Deki, S., Aoi, Y., Okibe, J., Yanagimoto, H., Kajinami, A., and Mizuhata, M., J. Mater. Chem. 7, 1769 (1997).CrossRefGoogle Scholar
13.Deki, S., Aoi, Y., and Kajinami, A., J. Mater. Sci. 32, 4269 (1997).Google Scholar
14.Schmitt, R. H., Grove, E. L., and Brown, R. D., J. Am. Chem. Soc. 82, 5292 (1960).CrossRefGoogle Scholar
15.Deki, Shigehito and Aoi, Yoshifumi, unpublished.Google Scholar
16.Deki, Shigehito and Aoi, Yoshifumi, unpublished.Google Scholar
17.Casella, I. G. and Desimoni, E., Electroanal. 8, 447 (1996).CrossRefGoogle Scholar
18.Schierbaum, K. D., Fischer, S., Torquemada, M. C., de Segovia, J. L., Roman, E., and Martin-Gago, J. A., Surf. Sci. 345, 261 (1996).Google Scholar
19.Poroshkov, V. P. and Gurin, V. S., Surf. Sci. 331–333, 1520 (1995).CrossRefGoogle Scholar
20.Ilie, I. and Ptron, L., J. Mater. Sci. Lett. 6, 932 (1987).Google Scholar