Hostname: page-component-cd9895bd7-mkpzs Total loading time: 0 Render date: 2024-12-30T22:38:10.990Z Has data issue: false hasContentIssue false
  • English
  • Français

Aerosol synthesis of AlN by nitridation of aluminum vapor and clusters

Published online by Cambridge University Press:  03 March 2011

Sotiris E. Pratsinis ,
Guizhi Wang ,
Siddhartha Panda ,
Theresa Guiton  and
Alan W. Weimer
Sotiris E. Pratsinis*
Affiliation:
Department of Chemical Engineering, Center for Aerosol Processes, University of Cincinnati, Cincinnati, Ohio 45221-0171
Guizhi Wang
Affiliation:
Department of Chemical Engineering, Center for Aerosol Processes, University of Cincinnati, Cincinnati, Ohio 45221-0171
Siddhartha Panda
Affiliation:
Department of Chemical Engineering, Center for Aerosol Processes, University of Cincinnati, Cincinnati, Ohio 45221-0171
Theresa Guiton
Affiliation:
Advanced Ceramics Laboratory, The Dow Chemical Co., 1776 Building, Midland, Michigan 48674
Alan W. Weimer
Affiliation:
Advanced Ceramics Laboratory, The Dow Chemical Co., 1776 Building, Midland, Michigan 48674
*
a)Author to whom correspondence should be addressed.
Get access

Abstract

Aluminum nitride (AlN) powders were produced in an aerosol flow reactor by direct nitridation of aluminum vapor with ammonia and nitrogen in flowing argon. In the presence of excess NH3, pure AlN powders were obtained from 1400 to 1873 K. These powders had higher specific surface areas than commercially available AlN powders. The effects of reactor temperature and gas flow rate on AlN purity, yield, and grain and crystallite size were investigated. The BET grain diameter of AlN increased as the process temperature increased, indicating sintering controlled particle formation and growth. Both the crystallite size and the BET grain size of pure AlN powders slightly decreased as ammonia flow rate was increased. Increasing temperature and flow rate increased the AlN yield.

Type
Environmentally Benign Materials and Processes
Information
Journal of Materials Research , Volume 10 , Issue 3 , March 1995 , pp. 512 - 520
Copyright
Copyright © Materials Research Society 1995

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1Kuramoto, N. and Taniguchi, H., US Patent 4,618,592 (1986).Google Scholar
2Taylor, K. M. and Lenie, C., J. Electrochem. Soc. 107, 308–314 (1960).CrossRefGoogle Scholar
3Wakimura, K. and Hiai, A., Kinoo Zairyo 11, 13–19 (1991).Google Scholar
4Heymer, G. and Harnisch, H., US Patent 3,352,637 (1967).Google Scholar
5Hotta, N., Kimura, I., Tsukuno, A., Saito, N., and Matsuo, S., Yogyo-Kyokai-Shi 95, 274–278 (1987).CrossRefGoogle Scholar
6Kimura, I., Ichiya, K., Ishii, M., and Hotta, N., J. Mater. Sci. Lett. 8, 303–304 (1989).CrossRefGoogle Scholar
7Yokota, K., Yagyu, S., Majima, K., and Nagai, H., Powder and Powder Metallurgy 38, 382–385 (1992).CrossRefGoogle Scholar
8Wirth, D. G., in Engineered Materials Handbook (Ceramics and Glasses, ASM International, S. J. Schneider, volume chairman, Materials Park, OH, 1991), Vol. 4, pp. 1107–1111.Google Scholar
9Sheppard, L. M., Ceram. Bull. 69, 1801–1812 (1990).Google Scholar
10Reynolds, W. C., STANJAN-Interactive Computer Programs for Chemical Equilibrium Analysis, Dept. of Mech. Engr., Stanford University, Stanford, CA (1987).Google Scholar
11Chase, M. W. Jr., Davies, C. A., Downey, J. R. Jr., Frurip, D. J., McDonald, R. A., and Syverud, A. N., JANAF Thermochemical Tables, 3rd ed., Parts I and II (American Chemical Society, Washington, DC, and the American Institute of Physics, New York, 1985).Google Scholar
12Hashman, T. W. and Pratsinis, S. E., J. Am. Ceram. Soc. 75, 920–928 (1992).CrossRefGoogle Scholar
13Kingon, A., Lutz, L. J., and Davis, R. F., J. Am. Ceram. Soc. 66, 558–566 (1983).CrossRefGoogle Scholar
14Kim, S. S. and Lee, S. C., Tahehan Kumosk Hakhoechi 23, 1–25 (1985).Google Scholar
15Cullity, B. D., Elements of X-ray Diffraction (Addison-Wesley Publishing Co., Reading, MA, 1978).Google Scholar
16Kuramoto, N., Taniguchi, H., and Aso, I., Ceram. Bull. 68, 883–887 (1989).Google Scholar
17Hashman, T., M. S. Thesis, University of Cincinnati, OH (1991).Google Scholar