Hostname: page-component-cd9895bd7-dzt6s Total loading time: 0 Render date: 2024-12-29T05:07:12.224Z Has data issue: false hasContentIssue false
  • English
  • Français

Amorphous silicon nitride fibers grown from the vapor phase

Published online by Cambridge University Press:  03 March 2011

Frederick T. Wallenberger  and
Paul C. Nordine
Frederick T. Wallenberger
Affiliation:
Department of Materials Science and Engineering, University of Illinois, 1304 West Green Street, Urbana, Illinois 61801
Paul C. Nordine
Affiliation:
Containerless Research, Incorporated, 735 Carriage Way, Deerfield, Illinois 60015
Get access

Abstract

Using high reactor pressures (>1 bar) and a unique rate control mechanism, three fibers were recently obtained by laser assisted chemical vapor deposition (LCVD) having elemental (i.e., boron, carbon, and silicon) compositions, small diameters (>9 μm), and surprisingly high growth rates (0.3–1.1 mm/s). By reacting silane and ammonia at high pressures (>1 bar) near the focus of a Nd-YAG laser beam, we have now obtained the first LCVD fibers with binary (i.e., silicon-nitrogen and silicon nitride) compositions having small diameters and high growth rates (0.34–0.74 mm/s). These fibers were amorphous.

Type
Rapid Communications
Information
Journal of Materials Research , Volume 9 , Issue 3 , March 1994 , pp. 527 - 530
Copyright
Copyright © Materials Research Society 1994

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1Nelson, L. S. and Richardson, N. L., Mater. Res. Bull. VII, 971 (1972).CrossRefGoogle Scholar
2Bäuerle, D., Chemical Processing With Lasers (Springer-Verlag, Berlin, 1986), pp. 71, 93, and 224.CrossRefGoogle Scholar
3Westberg, H., Boman, M., Norekrans, A-S., and Carlsson, J-O., Thin Solid Films 215, 126 (1992).CrossRefGoogle Scholar
4Wallenberger, F. T. and Nordine, P. C., Mater. Lett. 14, 981 (1992).CrossRefGoogle Scholar
5Wallenberger, F. T. and Nordine, P. C., Science 260, 66 (1993).CrossRefGoogle Scholar
6Nordine, P. C., de la Veaux, S. C., and Wallenberger, F. T., Appl. Phys. A 57, 97–100 (1993).CrossRefGoogle Scholar
7Wallenberger, F. T., Nordine, P. C., and Boman, M., International Workshop on Advances in Inorganic Fiber Technology, August 14, 1992, Melbourne, Australia; Extended Workshop Abstracts, 55 (1992); Composites Science and Technology (1994, in press).Google Scholar