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Analysis of the NdBa2Cu3Ox thin film growth mechanism by time of flight mass spectrometry of the laser plume

Published online by Cambridge University Press:  31 January 2011

M. Badaye ,
K. Fukushima  and
T. Morishita
M. Badaye
Affiliation:
Superconductivity Research Laboratory, International Superconductivity Technology Center, 10–13 Shinonome, 1-chome, Koto-ku, Tokyo 135, Japan
K. Fukushima
Affiliation:
Superconductivity Research Laboratory, International Superconductivity Technology Center, 10–13 Shinonome, 1-chome, Koto-ku, Tokyo 135, Japan
T. Morishita
Affiliation:
Superconductivity Research Laboratory, International Superconductivity Technology Center, 10–13 Shinonome, 1-chome, Koto-ku, Tokyo 135, Japan
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Abstract

Time of flight (TOF) spectroscopic measurements are used to diagnose the laser-generated plume of ceramic NdBa2Cu3Ox targets. We have been able to directly correlate the laser-deposited films' properties such as superconductivity, crystallinity, and orientation with plasma properties. Study of the TOF spectra shows that at laser fluences greater than 3 J/cm2 the plume become Nd-rich, and this leads to a low Tc in the deposited film. We have also shown the effect of target density on the energy of the plume species, and through energy considerations we have explained the observed change in the crystalline orientation of films from c- to a-orientation with increasing the target density. Finally, we have examined the oxidation mechanism of NdBa2Cu3Ox thin films, and have shown that highly energetic atomic oxygens have a prevailing role in oxidizing our laser-deposited thin films.

Type
Articles
Information
Journal of Materials Research , Volume 11 , Issue 5 , May 1996 , pp. 1072 - 1075
Copyright
Copyright © Materials Research Society 1996

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References

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