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Annealing of LiCoO2 films on flexible stainless steel for thin film lithium batteries

Published online by Cambridge University Press:  22 October 2019

Yibo Ma
Affiliation:
Beijing Engineering Research Center of Advanced Structural Transparencies for the Modern Traffic System, Beijing Institute of Aeronautical Materials, Beijing 100095, China
Mu Chen
Affiliation:
Beijing Engineering Research Center of Advanced Structural Transparencies for the Modern Traffic System, Beijing Institute of Aeronautical Materials, Beijing 100095, China
Yue Yan*
Affiliation:
Beijing Engineering Research Center of Advanced Structural Transparencies for the Modern Traffic System, Beijing Institute of Aeronautical Materials, Beijing 100095, China
Youxiu Wei
Affiliation:
Beijing Engineering Research Center of Advanced Structural Transparencies for the Modern Traffic System, Beijing Institute of Aeronautical Materials, Beijing 100095, China
Weiming Liu
Affiliation:
Beijing Engineering Research Center of Advanced Structural Transparencies for the Modern Traffic System, Beijing Institute of Aeronautical Materials, Beijing 100095, China
Xiaofeng Zhang
Affiliation:
Beijing Engineering Research Center of Advanced Structural Transparencies for the Modern Traffic System, Beijing Institute of Aeronautical Materials, Beijing 100095, China
Jiaming Li
Affiliation:
Beijing Engineering Research Center of Advanced Structural Transparencies for the Modern Traffic System, Beijing Institute of Aeronautical Materials, Beijing 100095, China
Ziyi Fu
Affiliation:
Beijing Engineering Research Center of Advanced Structural Transparencies for the Modern Traffic System, Beijing Institute of Aeronautical Materials, Beijing 100095, China
Jiuyong Li
Affiliation:
Beijing Engineering Research Center of Advanced Structural Transparencies for the Modern Traffic System, Beijing Institute of Aeronautical Materials, Beijing 100095, China
Xuan Zhang
Affiliation:
Beijing Engineering Research Center of Advanced Structural Transparencies for the Modern Traffic System, Beijing Institute of Aeronautical Materials, Beijing 100095, China
*
a)Address all correspondence to this author. e-mail: Yue.yan@biam.ac.cn
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Abstract

The LiCoO2 films were directly deposited on stainless steel (SS) using medium-frequency magnetron sputtering, and the effects of annealing parameters, such as ambiences, temperatures, holding times, and heating rates, were systematically compared based on surface morphologies, crystal structures, and electrochemical properties. The results demonstrate that an aerobic atmosphere with 3.5 Pa is the most important parameter to maintain the performance of LiCoO2 films. The influence of the annealing temperature (>550 °C) ranks second because the formed (101) or (104) planes of LiCoO2 facilitate Li+ migration. A short holding time of 20 min and a moderate heating rate of 3 °C/min are selected to reduce the oxidation or inter-diffusion between the LiCoO2 films and the SS substrate. Finally, the optimal annealing process is confirmed and corresponds to the initial discharge capacity of 37.56 μA h/(cm2 μm) and the capacity retention of 83.81% at the 50th cycle.

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Article
Copyright
Copyright © Materials Research Society 2019 

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References

Yoon, Y.S., Park, C.H., and Kim, J.H.: Lattice orientation control of lithium cobalt oxide cathode film for all-solid-state thin film batteries. J. Power Sources 226, 186 (2013).CrossRefGoogle Scholar
Castaneda, H.: The impedance response of different mechanisms for LiCoO2/acetylene carbon electrodes in alkaline solutions under polarization conditions. Electrochim. Acta 112, 562 (2013).CrossRefGoogle Scholar
Ribeiro, J.F., Sousa, R., Sousa, J.A., Goncalves, L.M., Silva, M.M., Dupont, L., and Correia, J.H.: Flexible thin-film rechargeable lithium battery. In Transducers (IEEE, Barcelona, Spain, 2013); p. 2233.Google Scholar
ID TechEx Ltd.: Flexible, printed and thin film batteries 2019–2029 (2018). Available at: https://www.giiresearch.com/report/ix314818-flexible-printed-thin-film-batteries.html (accessed September 03, 2019).Google Scholar
Lee, H.S., Kim, S., Kim, K-B., and Choi, J-W.: Scalable fabrication of flexible thin-film batteries for smart lens applications. Nano Energy 53, 225 (2018).CrossRefGoogle Scholar
Yang, Z.M., Xing, G.J., Yang, J., Mao, C.H., and Du, J.: Effects of annealing temperature on structure and electrochemical properties of LiCoO2 cathode thin films. Rare Met. 25, 189 (2006).CrossRefGoogle Scholar
Yoon, Y.S., Lee, S.H., Cho, S.B., and Nam, S.C.: Influence of two-step heat treatment on sputtered lithium cobalt oxide thin films. J. Electrochem. Soc. 158, A1313 (2011).CrossRefGoogle Scholar
Kim, H.K. and Yoon, Y.S.: Characteristics of rapid-thermal-annealed LiCoO2 cathode film for an all-solid-state thin film microbattery. J. Vac. Sci. Technol., A 22, 1182 (2004).CrossRefGoogle Scholar
Park, H.Y., Nam, S.C., Lim, Y.C., Choi, K.G., Lee, K.C., Park, G.B., Kim, J.B., Kim, H.P., and Chao, S.B.: LiCoO2 thin film cathode fabrication by rapid thermal annealing for micro power sources. Electrochim. Acta 52, 2062 (2007).CrossRefGoogle Scholar
Chiu, K.F., Hsiao, H.H., Chen, G.S., and Liu, H.L.: Structural evolution and stability of RF sputter deposited LixMn2−yO4 thin film cathodes. J. Electrochem. Soc. 151, A452 (2004).CrossRefGoogle Scholar
Kim, W.S.: Characteristics of LiCoO2 thin film cathodes according to the annealing ambient for the post-annealing process. J. Power Sources 134, 103 (2004).CrossRefGoogle Scholar
Jeon, S.W., Lim, J.K., Lim, S.M., and Lee, S.M.: As-deposited LiCoO2 thin film cathodes prepared by rf magnetron sputtering. Electrochim. Acta 51, 268 (2005).CrossRefGoogle Scholar
Fragnaud, P., Nagarahan, R., Schleich, D.M., and Vujic, D.: Thin-film cathodes for secondary lithium batteries. J. Power Sources 54, 362 (1995).CrossRefGoogle Scholar
Kang, Y.S., Lee, H., Kang, Y.M., Lee, P.S., and Lee, J.Y.: Crystallization of lithium cobalt oxide thin films by radio-frequency plasma irradiation. J. Appl. Phys. 90, 5940 (2001).CrossRefGoogle Scholar
Kang, Y.S., Lee, H., Park, S.C., Lee, P.S., and Lee, J.Y.: Plasma treatments for the low temperature crystallization of LiCoO2 thin films. J. Electrochem. Soc. 148, A1254 (2001).CrossRefGoogle Scholar
British Stainless Steel Association: Heat tint (temper) colors on stainless steel surfaces heated in air (2016). Available at: https://www.bssa.org.uk/topics.php?article=140 (accessed September 03, 2019).Google Scholar
Seveno, R., Limousin, P., Averty, D., Chartier, J-L., Bihan, R.L., and Gundel, H.W.: Preparation of multi-coating PZT thick films by sol–gel method onto stainless steel substrates. J. Eur. Ceram. Soc. 20, 253 (2000).CrossRefGoogle Scholar
Kale, G.B., Patil, R.V., and Gawade, P.S.: Interdiffusion studies in titanium–304 stainless steel system. J. Nucl. Mater. 257, 44 (1998).CrossRefGoogle Scholar
Jung, K-T., Cho, G-B., Kim, K-W., Nam, T-H., Jeong, H-M., Huh, S-C., Chung, H-S., and Noh, J-P.: Influence of the substrate texture on the structural and electrochemical properties of sputtered LiCoO2 thin films. Thin Solid Films 546, 414 (2013).CrossRefGoogle Scholar
Kushida, K., Kuriyama, K., and Cryst, J.: Sol–gel growth of LiCoO2 films on Si substrates by a spin-coating method. J. Cryst. Growth 237–239, 612 (2002).CrossRefGoogle Scholar
Ni, C-T. and Fung, K-Z.: Fabrication of LiCoO2 thin films on flexible stainless steel substrate for lithium ion batteries. Solid State Ionics 179, 1230 (2008).CrossRefGoogle Scholar
Noh, J.P., Cho, G.B., Jung, K.T., Kang, W.G., Ha, C.W., Ahn, H.J., Nam, T.H., and Kim, K.W.: Fabrication of LiCoO2 thin film cathodes by DC magnetron sputtering method. Mater. Res. Bull. 47, 2823 (2012).CrossRefGoogle Scholar
Okubo, M., Hosono, E., Kudo, T., Zhou, H.S., and Honma, I.: Phonon confinement effect on nano-crystalline LiCoO2 studied with Raman spectroscopy. J. Phys. Chem. Solids 69, 2911 (2008).CrossRefGoogle Scholar
Dudney, N.J. and Jang, Y.H.: Analysis of thin-film lithium batteries with cathodes of 50 nm to 4 mm thick LiCoO2. J. Power Sources 119–121, 300 (2003).CrossRefGoogle Scholar
Park, H.Y., Nam, S.C., Lim, Y.C., Choi, K.G., Lee, K.C., Park, G.B., Kim, H.P., and Cho, S.B.: Influence of sputtering gas pressure on the LiCoO2 thin film cathode post-annealed at 400 °C. Korean J. Chem. Eng. 23, 832 (2006).CrossRefGoogle Scholar
Kim, H.K., Seong, T.Y., and Yoon, Y.S.: Characteristics of rapid-thermal-annealed LiN1−xCoxO2 cathode film for all-solid-state rechargeable thin film micro-batteries. Thin Solid Films 447–448, 619 (2004).CrossRefGoogle Scholar
Chung, Y.G., Park, H.Y., Oh, S.H., and Yoon, D.Y.: Structural and electrochemical properties of LiNi0.7Co0.15Mn0.15O2 thin film prepared by high frequency hybrid direct current and ratio frequency magnetron sputtering. J. Electroceram. 31, 316 (2013).CrossRefGoogle Scholar
Fung, K.Z., Ni, C.T., Tsai, S.Y., Chen, M.H., Orliukas, A.F., and Bajars, G.: Nanostructured LiCoO2 cathode by hydrothermal process. ACS 23–34, 35 (2014).Google Scholar
Brousse, T., Fragnaud, P., and Marchand, D.R.: Characterization of sprayed and sputter deposited LiCoO2 thin films for rechargeable microbatteries. J. Power Sources 2, 398 (1996).Google Scholar
Peterson, I.M. and Tien, T.Y.: Effect of the grain boundary thermal expansion coefficient on the fracture toughness in silicon nitride. J. Am. Ceram. Soc. 78, 2345 (1995).CrossRefGoogle Scholar
Dupi, J.C., Gonbeau, D., Martin-Litas, I., Binatier, P., and Levasseur, A.: Lithium intercalation/deintercalation in transition metal oxides investigated by X-ray photoelectron spectroscopy. J. Electron Spectrosc. Relat. Phenom. 120, 55 (2001).CrossRefGoogle Scholar
Tang, S.B., Lu, L., and Lai, M.O.: Characterization of a LiCoO2 thin film cathode grown by pulsed laser deposition. Philos. Mag. 85, 2831 (2005).CrossRefGoogle Scholar
Magnfalt, D., Fillon, A., and Boyd, R.D.: Compressive intrinsic stress originates in the grain boundaries of dense refractory polycrystalline thin films. J. Appl. Phys. 119, 055305 (2016).CrossRefGoogle Scholar
Chason, E.: A kinetic analysis of residual stress evolution in polycrystalline thin films. Thin Solid Films 526, 1 (2012).CrossRefGoogle Scholar
Koutsokeras, L.E. and Abadias, G.: Intrinsic stress in ZrN thin films: Evaluation of grain boundary contribution from in situ wafer curvature and ex situ X-ray diffraction technique. J. Appl. Phys. 111, 093509 (2012).CrossRefGoogle Scholar
Zhou, S.J., Wu, W., and Shao, T.M.: Effect of post deposition annealing on residual stress stability of gold films. Surf. Coat. Technol. 304, 222 (2016).CrossRefGoogle Scholar
Chason, E. and Guduru, P.R.: Tutorial: Understanding residual stress in polycrystalline thin films through real-time measurements and physical models. J. Appl. Phys. 119, 191101 (2016).CrossRefGoogle Scholar
Cheng, E., Talot, N., and Wolfenstine, J.: Elastic properties of lithium cobalt oxide (LiCoO2). J. Asian Ceram. Soc. 5, 13 (2017).CrossRefGoogle Scholar
Zhang, Y., Chung, C., and Zhu, M.: Growth of HT-LiCoO2 thin films on Pt-metalized silicon substrates. Rare Met. 27, 266 (2008).CrossRefGoogle Scholar
Choi, W.G. and Yoon, S.G.: Improvement of electrochemical properties in LiCoO2 cathode films grown on Pt/TiO2/SiO2/SiPt/TiO2/SiO2/Si substrates by liquid-delivery metalorganic chemical vapor deposition. J. Vac. Sci. Technol., A 22, 2356 (2004).CrossRefGoogle Scholar
Xia, H., Lu, L., Meng, Y.S., and Gender, G.: Phase transitions and high-voltage electrochemical behavior of LiCoO2 thin films grown by pulsed laser deposition. J. Electrochem. Soc. 154, A337 (2007).CrossRefGoogle Scholar
Kang, T.W. and Kim, T.W.: Structural properties of TiN films grown on stainless steel substrates by a reactive radio-frequency sputtering technique at low temperature. Appl. Surf. Sci. 150, 190 (1990).CrossRefGoogle Scholar
Choi, Y.M., Pyun, S.I., Bae, J.S., and Moon, S.I.: Effect of lithium content on the electrochemical lithium intercalation reaction into LiNiO2 and LiCoO2 electrodes. J. Power Sources 56, 25 (1995).CrossRefGoogle Scholar
Amatucci, G.G., Tarascon, J.M., Larcher, D., and Klein, L.C.: Synthesis of electrochemically active LiCoO2 and LiNiO2 at 100 °C. Solid State Ionics 84, 169 (1996).CrossRefGoogle Scholar
Yoshio, M., Tanaka, H., Tominaga, K., and Noguchi, H.: Synthesis of LiCoO2 from cobalt-organic acid complexes and its electrode behavior in a lithium secondary battery. J. Power Sources 40, 347 (1992).CrossRefGoogle Scholar
Qian, J.W., Liu, L., Yang, J.X., Li, S.Y., Wang, X., Zhuang, H.L., and Lu, Y.Y.: Electrochemical surface passivation of LiCoO2 particles at ultrahigh voltage and its applications in lithium-based batteries. Nat. Commun. 9, 4918 (2018).CrossRefGoogle ScholarPubMed