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Chemical solution deposition of biaxially oriented (Ba,Sr)TiO3 thin films on 〈100〉 Ni

Published online by Cambridge University Press:  03 March 2011

R. J. Ong ,
J. T. Dawley  and
P. G. Clem
R. J. Ong
Affiliation:
Microsystem Materials, Tribology and Technologies Department, Sandia National Laboratories, Albuquerque, New Mexico 87185–1411; and Department of Materials Science and Engineering, University of Illinois at Urbana-Champaign, Urbana, Illinois 61801
J. T. Dawley
Affiliation:
Microsystem Materials, Tribology and Technologies Department, Sandia National Laboratories, Albuquerque, New Mexico 87185–1411
P. G. Clem
Affiliation:
Microsystem Materials, Tribology and Technologies Department, Sandia National Laboratories, Albuquerque, New Mexico 87185–1411
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Abstract

Biaxially oriented Ba1−xSrxTiO3 (BST) thin films were fabricated under a highly reducing atmosphere (oxygen partial pressure ∼10−18 atm) on base metal substrates (〈100〉 Ni) using a fluorinated chemical solution deposition method. The degree of film orientation was investigated with respect to film annealing temperature and composition (x = 0, 0.33, 0.5, 0.67, 1). The solution synthesis route included fluorinated solvents, donor-dopants, and chelating agents for control of orientation, defect chemistry, and morphology. Free-energy and phase diagrams guided solution development using halide addition to avoid intermediate BaCO3 formation and instead produce direct crystallization of BaTiO3-type materials from BaF2. The degree of (200) orientation of BST films deposited on 〈100〉 Ni substrates displayed a compositional dependence for 0 < x < 1, with a maximum orientation Lotgering factor approaching unity. Low-temperature (500 °C) crystallization of highly oriented films was demonstrated for solution-derived BST on Ni, which may have enabling materials integration implications for capacitors and other applications.

Type
Articles
Information
Journal of Materials Research , Volume 18 , Issue 10 , October 2003 , pp. 2310 - 2317
Copyright
Copyright © Materials Research Society 2003

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