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Controlling electromigration to selectively form thin metal wires and metal microspheres

Published online by Cambridge University Press:  31 January 2011

Masumi Saka ,
Kei Kato ,
Hironori Tohmyoh  and
Yuxin Sun
Masumi Saka*
Affiliation:
Department of Nanomechanics, Tohoku University, Aramaki, Aoba-ku, Sendai 980-8579, Japan
Kei Kato
Affiliation:
Department of Nanomechanics, Tohoku University, Aramaki, Aoba-ku, Sendai 980-8579, Japan
Hironori Tohmyoh
Affiliation:
Department of Nanomechanics, Tohoku University, Aramaki, Aoba-ku, Sendai 980-8579, Japan
Yuxin Sun
Affiliation:
Department of Nanomechanics, Tohoku University, Aramaki, Aoba-ku, Sendai 980-8579, Japan
*
a)Address all correspondence to this author. e-mail: saka@ism.mech.tohoku.ac.jp
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Abstract

Guidelines for selecting the shape formed by metal discharged from a narrow Al line were developed. By controlling electromigration in the line, either relatively large microspheres, thin wires, or relatively small microspheres could be formed. Our starting point was a passivated polycrystalline Al line with a slit and small holes at the anode end of it. In the discussion, we describe how the temperature of a part of a wire, T*, at the moment when the part is completely discharged from the hole, affects the shape of the microstructural feature formed from the metal. High, intermediate, and low values of T* were found to correspond to the formation of large microspheres, thin wires, and small microspheres, respectively. The experimental results are explained in the discussion.

Keywords

AlElectromigrationMicrostructure
Type
Articles
Information
Journal of Materials Research , Volume 23 , Issue 11 , November 2008 , pp. 3122 - 3128
Copyright
Copyright © Materials Research Society 2008

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References

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