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Dielectric properties of oxide structures by a laser-based direct-writing method

Published online by Cambridge University Press:  31 January 2011

D. Young ,
H. D. Wu ,
R. C. Y. Auyeung ,
R. Modi ,
J. Fitz-Gerald ,
A. Pique ,
D. B. Chrisey ,
P. Atanassova  and
T. Kodas
D. Young
Affiliation:
Naval Research Laboratories, Washington, D.C. 20375-5345
H. D. Wu
Affiliation:
Naval Research Laboratories, Washington, D.C. 20375-5345
R. C. Y. Auyeung
Affiliation:
Naval Research Laboratories, Washington, D.C. 20375-5345
R. Modi
Affiliation:
Naval Research Laboratories, Washington, D.C. 20375-5345
J. Fitz-Gerald
Affiliation:
Naval Research Laboratories, Washington, D.C. 20375-5345
A. Pique
Affiliation:
Naval Research Laboratories, Washington, D.C. 20375-5345
D. B. Chrisey
Affiliation:
Naval Research Laboratories, Washington, D.C. 20375-5345
P. Atanassova
Affiliation:
Superior Micropowders, Albuquerque, New Mexico 87109
T. Kodas
Affiliation:
Superior Micropowders, Albuquerque, New Mexico 87109
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Abstract

Matrix-assisted pulsed laser evaporation direct-write (MAPLE-DW) is a laser-based method of directly writing mesoscopic patterns of electronic materials. Patterns of composite BaTiO3/SiO2/TiO2 dielectric material were written onto Pt/Au interdigitated-electrode test structures, with precise control over final dielectric properties. Scanning electron microscopy indicates random close-packed structures of BaTiO3 and SiO3 particles, with interstitial spaces partially filled with titania. Depending on the BaTiO3:silica ratio, the dielectric constant ranged from 5 to 55 and followed a 4-component logarithmic rule of mixing. This work demonstrates that the transfer process and the final material properties of MAPLE-DW oxide materials are largely decoupled.

Type
Articles
Information
Journal of Materials Research , Volume 16 , Issue 6 , June 2001 , pp. 1720 - 1725
Copyright
Copyright © Materials Research Society 2001

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References

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