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Effect of lattice mismatch on the epitaxy of sol-gel LiNbO3 thin films

Published online by Cambridge University Press:  03 February 2012

T. A. Derouin ,
C. D. E. Lakeman ,
X. H. Wu ,
J. S. Speck  and
F. F. Lange
T. A. Derouin
Affiliation:
Materials Department and Materials Research Laboratory, University of California, Santa Barbara, California 93106
C. D. E. Lakeman
Affiliation:
Materials Department and Materials Research Laboratory, University of California, Santa Barbara, California 93106
X. H. Wu
Affiliation:
Materials Department and Materials Research Laboratory, University of California, Santa Barbara, California 93106
J. S. Speck
Affiliation:
Materials Department and Materials Research Laboratory, University of California, Santa Barbara, California 93106
F. F. Lange
Affiliation:
Materials Department and Materials Research Laboratory, University of California, Santa Barbara, California 93106
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Abstract

A solution precursor method based on metal alkoxides was used to produce epitaxial LiNbO3 thin films, ≈200 nm thick, on (0001) sapphire substrates. Transmission electron. microscopy revealed that the major cause of surface roughness in these films was grain boundary grooves between mosaic grains with misorientations ≤5°. It is postulated that these low angle boundaries directly result in surface grooving and roughness. The epitaxial films also contained two distinguishable variants in the film/substrate interfacial plane, namely, an aligned variant, and a 60° rotated variant, . A seeded grain growth method was used to minimize the presence of the 60° rotated variant. An epitaxial buffer layer of Fe2O3 was used to lower the mismatch strain, eliminate the 60° rotated variant, and reduce the mosaic nature of the LiNbO3 film. X-ray rocking curve full-width-at-half-maximum (FWHM) values measured on the film peak indicate that the mosaic character can be reduced from 1.5° to 0.76° by using a buffer layer.

Type
Articles
Information
Journal of Materials Research , Volume 12 , Issue 5 , May 1997 , pp. 1391 - 1400
Copyright
Copyright © Materials Research Society 1997

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