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Effect of surfactant on casting metalorganic films and writing copper metal patterns

Published online by Cambridge University Press:  31 January 2011

C.T. Lin ,
H.Y. Lee  and
M.A. Souto
C.T. Lin*
Affiliation:
Department of Chemistry, Northern Illinois University, DeKalb, Illinois 60115–2862
H.Y. Lee
Affiliation:
Department of Chemistry, Northern Illinois University, DeKalb, Illinois 60115–2862
M.A. Souto
Affiliation:
Department of Chemistry, Northern Illinois University, DeKalb, Illinois 60115–2862
*
a)Address correspondence to this author.
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Abstract

A highly effective wetting agent and emulsifier, Triton X-100 detergent is introduced to metalorganic solutions. When applied to a substrate, this detergent/metalorganic solution promotes the formation of a uniform spin-on thin film with good adhesion. The precursor, copper formate film, was spin-deposited with a metalorganic solution prepared by a solvent mixture of methanol and Triton X-100 (50:1 by volume). KrF laser (248 nm) direct writing of high-purity copper patterns on glass and polyimide substrates has been achieved. When the laser beam is imaged through a slit device, periodic copper metal structures with a linewidth of ∼2.5 μm are observed, which may be attributed to result from Fraunhofer diffraction. A general process for casting homogeneous amorphous films on substrates from a solution of molecular or ionic metalorganics dissolved in the neutral or charged micelles is proposed.

Type
Articles
Information
Journal of Materials Research , Volume 6 , Issue 4 , April 1991 , pp. 760 - 765
Copyright
Copyright © Materials Research Society 1991

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