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Effects of mixed abrasives in chemical mechanical polishing of oxide films

Published online by Cambridge University Press:  03 March 2011

Zhenyu Lu ,
Seung-Ho Lee ,
Venkata R. K. Gorantla ,
S. V. Babu  and
Egon Matijević
Zhenyu Lu
Affiliation:
Center for Advanced Materials Processing, Clarkson University, Potsdam, New York 13699–5814
Seung-Ho Lee
Affiliation:
Center for Advanced Materials Processing, Clarkson University, Potsdam, New York 13699–5814
Venkata R. K. Gorantla
Affiliation:
Center for Advanced Materials Processing, Clarkson University, Potsdam, New York 13699–5814
S. V. Babu
Affiliation:
Center for Advanced Materials Processing, Clarkson University, Potsdam, New York 13699–5814
Egon Matijević*
Affiliation:
Center for Advanced Materials Processing, Clarkson University, Potsdam, New York 13699–5814
*
b)Address all correspondence to this author.
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Abstract

Thermal oxide covered silicon wafers were polished with slurries containing (i) only nano-sized particles of ceria, monodispersed colloidal spherical silica, or hematite of different shapes, (ii) a binary mixture of the same nano-sized and uniform colloidal particles, and (iii) the same colloids coated with nano-sized ceria. The procedures for the preparation of the coated particles are described in this article. The polish rates and surface qualities were in all cases higher with mixed slurries, and even more so with coated particles. The performance of composite systems also depended on the shape of the particles, cubic ones being the most and spheres least efficient. Experimental results indicated that ceria in mixtures was responsible for the enhanced polish process, while core materials enhanced a closer contact of nano-sized particles with the wafer. In general, the polish rates were higher with the larger contact area between the abrasives and the wafer. This mechanism was further verified by polishing oxide wafers on 3-M fixed abrasive pads, which have cylindrical structures with flat surfaces.

Type
Articles
Information
Journal of Materials Research , Volume 18 , Issue 10 , October 2003 , pp. 2323 - 2330
Copyright
Copyright © Materials Research Society 2003

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References

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