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Elastic modulus measurement of multilayer metallic thin films

Published online by Cambridge University Press:  31 January 2011

Ki-Hyun Cho  and
Youngman Kim
Ki-Hyun Cho
Affiliation:
Department of Metallurgical Engineering, Chonnam National University, Kwangju, Korea 500–757
Youngman Kim
Affiliation:
Department of Metallurgical Engineering, Chonnam National University, Kwangju, Korea 500–757
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Abstract

Two- and three-layer composite models were developed using a beam vibration theory, and the models were applied for measuring Young's moduli of thin metallic films. The Cr, Ni, and Co-coated Si wafer composites (two-layer composite) and (Cr/Ti/Si) composites (three-layer composite) were produced by radio-frequency (rf) magnetron sputtering and used to test the developed models. Young's moduli of (Cr) films obtained by the three-layer composite model agree well with those of (Cr) films obtained by the two-layer composite model, considering (Ti/Si) as the one layer and (Cr) as the other layer. This suggests that moduli of multilayer films may be obtained by using a two-layer composite model repeatedly.

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Articles
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Journal of Materials Research , Volume 14 , Issue 5 , May 1999 , pp. 1996 - 2001
Copyright
Copyright © Materials Research Society 1999

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