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Following crack path selection in multifilm structures with weak and strong interfaces by in situ 4-point-bending

Published online by Cambridge University Press:  13 April 2015

Bernhard Völker ,
Sriram Venkatesan ,
Walther Heinz ,
Kurt Matoy ,
Roman Roth ,
Jörg-Martin Batke ,
Megan J. Cordill  and
Gerhard Dehm
Bernhard Völker
Affiliation:
KAI - Kompetenzzentrum Automobil- und Industrieelektronik GmbH, 9524 Villach, Austria; and Department Materials Physics, Montanuniversität Leoben, 8700 Leoben, Austria
Sriram Venkatesan
Affiliation:
Max-Planck-Institut für Eisenforschung GmbH, 40237 Düsseldorf, Germany
Walther Heinz
Affiliation:
KAI - Kompetenzzentrum Automobil- und Industrieelektronik GmbH, 9524 Villach, Austria
Kurt Matoy
Affiliation:
Infineon Technologies AG, 9500 Villach, Austria
Roman Roth
Affiliation:
Infineon Technologies AG, 9500 Villach, Austria
Jörg-Martin Batke
Affiliation:
Infineon Technologies AG, 93049 Regensburg, Germany
Megan J. Cordill
Affiliation:
Erich Schmid Institute of Materials Science, Austrian Academy of Sciences, 8700 Leoben, Austria
Gerhard Dehm*
Affiliation:
Max-Planck-Institut für Eisenforschung GmbH, 40237 Düsseldorf, Germany
*
a)Address all correspondence to this author. e-mail: dehm@mpie.de
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Abstract

In this study, the interfacial adhesion of Cu and TiN on an annealed borophosphosilicate glass (BPSG) in a multilayer material stack was investigated. The two material systems, Cu/BPSG and TiN/BPSG, are representatives for weak and strong interfaces, respectively. A weak and a strong interface was chosen to identify possible differences in the fracture path selection for the multilayer material systems. To investigate this, in situ 4-point-bending experiments were performed under an optical microscope and in a scanning electron microscope. Complementary ex situ 4-point-bending experiments were carried out on the identical material systems. These tests revealed that for the two analyzed systems there is a large discrepancy in the success rate of failure along the interface of interest, which is a prerequisite for determining the corresponding interface energy release rate. This phenomenon can be understood by using theoretical findings of earlier studies reported in the literature, which are in agreement with the experimental outcome of the in situ 4-point-bending measurements presented here.

Keywords

adhesionfilmfracture
Type
Articles
Information
Journal of Materials Research , Volume 30 , Issue 8 , 28 April 2015 , pp. 1090 - 1097
Copyright
Copyright © Materials Research Society 2015 

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References

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