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Formation of microcones accompanied with ripple patterns in laser-activated plasma CVD of sp3-bonded BN films

Published online by Cambridge University Press:  04 February 2014

Shojiro Komatsu  and
Masaharu Shiratani
Shojiro Komatsu*
Affiliation:
Plasma Application Group, National Institute for Materials Science, Tsukuba, Ibaraki 305-0044, Japan
Masaharu Shiratani
Affiliation:
Kyushu University, Motooka, Fukuoka 819-0395, Japan
*
a)Address all correspondence to this author. e-mail: Komatsu.Shojiro@nims.go.jp
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Abstract

Scanning electron microscopic (SEM) observations revealed that individual and independent microcones of sp3-bonded boron nitride grown by laser-activated plasma chemical vapor deposition were accompanied by ripple patterns spreading around them in the dimension of micrometers or sub-micrometers. The ripples were expanding equidistantly from each other and diminishing as they depart from a cone. The origin of the ripples was attributed to the interference of a direct laser cast on the plane surface and that reflected from the side of a cone; this model was satisfactorily in agreement with the SEM measurement, in which the side surface of a cone was mapped onto the plane surface surrounding the cone in the mathematical meaning of “bijection.” This micro-optical effect due to the wave nature of laser was considered to indicate and support the photochemically activated growth reactions in this process.

Type
Articles
Information
Journal of Materials Research , Volume 29 , Issue 4 , 28 February 2014 , pp. 485 - 491
Copyright
Copyright © Materials Research Society 2014 

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References

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