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Formation threshold and structural evolution of molybdenum nanocrystals with sputtering pressure

Published online by Cambridge University Press:  31 January 2011

G. M. Chow ,
C. L. Chien  and
A. S. Edelstein
G. M. Chow*
Affiliation:
Naval Research Laboratory, Washington, DC 20375
C. L. Chien
Affiliation:
Department of Physics and Astronomy, Johns Hopkins University, Baltimore, Maryland 21218
A. S. Edelstein
Affiliation:
Naval Research Laboratory, Washington, DC 20375
*
a)Research Associate of the National Research Council, National Academy of Sciences.
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Abstract

The evolution of the size and shape of molybdenum nanocrystals fabricated by sputtering in a thermal gradient has been studied as a function of the argon gas pressure, p. For 4 < p < 100 mTorr, continuous Mo films are deposited. At p = 150 mTorr, isolated and well-faceted Mo nanocrystals of two sizes (20 and 5 nm average size) are formed. For 200 ≤ p ≤ 400 mTorr, the particle size decreases with increasing pressure and is about 7 nm at 400 mTorr. On increasing p further, larger particles start to form and at p = 700 mTorr, particle agglomerates are observed. Possible mechanisms leading to these results are suggested.

Type
Materials Communications
Information
Journal of Materials Research , Volume 6 , Issue 1 , January 1991 , pp. 8 - 10
Copyright
Copyright © Materials Research Society 1991

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