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In situ analysis of gaseous species for chemical vapor deposition diamond synthesis and the possible reaction model

Published online by Cambridge University Press:  31 January 2011

Mayu Uede  and
Yoshiki Takagi
Mayu Uede
Affiliation:
Teikyo University of Science and Technology, Yassawa 2525, Uenohara-machi, Kitatsuru-gun, Yamanashi-Pref., 409–0193, Japan
Yoshiki Takagi
Affiliation:
Teikyo University of Science and Technology, Yassawa 2525, Uenohara-machi, Kitatsuru-gun, Yamanashi-Pref., 409–0193, Japan
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Abstract

For a few years, we had been concentrating on development of completely closed diamond synthesizing system aimed for microgravity experiments. Recently we started the new method with a graphite heater as carbon source. With this method, a completely closed system is successfully performed. In situ gaseous species analysis with gas chromatography and the possible reaction model is discussed.

Type
Articles
Information
Journal of Materials Research , Volume 16 , Issue 11 , November 2001 , pp. 3069 - 3072
Copyright
Copyright © Materials Research Society 2001

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References

REFERENCES

1.Angus, J.C., Will, H.A., and Stanko, W.S., J. Appl. Phys. 39, 2915 (1968).CrossRefGoogle Scholar
2.Kamo, M., Sato, Y., Matsumoto, S., and Setaka, H., J. Cryst. Growth 62, 642 (1983).CrossRefGoogle Scholar
3.Genchi, Y., Yasuda, T., and Komiyama, H., Int. Chem. Eng. 32, 560 (1993).Google Scholar
4.Tsang, R. and May, S., Int. Chem. Eng. 32, 560 (1992).Google Scholar
5.Hirose, Y.,Proceeding of 1st International Conference for New Diamond Science and Technology (KTK Terra Publish., Tokyo, Japan, 1988), p. 51.Google Scholar
6.Takagi, Y., Sato, S., Kaigawa, K., Sawaoka, A.B., and Regel, L.L., Microgravity Q. 2, 39 (1992).Google Scholar
7.Sato, S., Kaigawa, K., Takagi, Y., Hirose, Y., and Sawaoka, A.B., J. Jpn. Soc. Microgravity Appl. 10, 38 (1993).Google Scholar
8.Tanabe, Y., Kaigawa, K., Takagi, Y., and Sawaoka, A.B., J. Jpn. Soc. Microgravity Appl. 11, 71 (1994).Google Scholar
9.Takagi, Y., Hibiya, K., and Takeuchi, H., J. Jpn. Soc. Microgravity Appl. 13, 225 (1996).Google Scholar
10.Takagi, Y., Regel, L.L., and Wilcox, W.R., Trans. Mater. Res. Soc. Jpn. 24, 513 (1999).Google Scholar
11.Takagi, Y., Regel, L.L., and Wilcox, W.R., J. Jpn. Soc. Microgravity Appl. 15, 140 (1998).Google Scholar
12.Takagi, Y., Suzuki, M., Abe, H., and Inatomi, Y., J. Jpn. Soc. Microgravity Appl. 17, 159 (2000).Google Scholar
13.Yoshikawa, M., Katagiri, G., Ishida, H., and Ishitani, A., Solid State Commun. 66, 1177 (1988).CrossRefGoogle Scholar
14.Gat, R. and Angus, J.C., J. Appl. Phys. 74, 5981 (1993).CrossRefGoogle Scholar