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In situ Observation of Fracture Sequence of Physical Vapor Deposited TiN Film on (1120) Sapphire

Published online by Cambridge University Press:  01 June 2005

Young-Gu Kim  and
Do Kyung Kim
Young-Gu Kim
Affiliation:
Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology (KAIST), Yusong, Taejon 305-701, Korea
Do Kyung Kim*
Affiliation:
Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology (KAIST), Yusong, Taejon 305-701, Korea
*
a) Address all correspondence to this author. e-mail: dkkim@kaist.ac.kr
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Abstract

The critical parameters for the structural stability of physical vapor deposited TiN film on (1120) sapphire were investigated by analyzing the adhesion strength and failure mechanism through in situ observations of the fracture sequence during scratch tests and static normal indentation. TiN was deposited by arc ion plating on (1120) sapphire, and the thickness of the TiN film was controlled to 700 nm. Delamination of TiN film was monitored in situ from below the contact through a transparent sapphire substrate, using zoom optics mounted into a video imaging sensor. In situ observation enables us to detect the failure origin of TiN coating on sapphire. The failure origin of TiN film on (1120) sapphire was identified as both rhombohedral and basal twinning of the sapphire substrate. Rhombohedral twinning was initiated first, and basal twinning ensued. Twinning-induced plastic deformation of the sapphire substrate triggered the initiation of interfacial delamination of the TiN coating. The plastic deformation of the substrate ultimately induced failure of the protective coating.

Keywords

CoatingFractureIndentation
Type
Articles
Information
Journal of Materials Research , Volume 20 , Issue 6 , June 2005 , pp. 1389 - 1395
Copyright
Copyright © Materials Research Society 2005

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References

REFERENCES

1Hainsworth, S.V. and Soh, W.C.: The effect of the substrate on the mechanical properties of TiN coatings. Surf. Coat. Technol. 163–164, 515 (2003).CrossRefGoogle Scholar
2Ma, S., Xu, K. and He, J.: Parametric effects of residual stress in pulsed d.c. plasma enhanced CVD TiN coating. Surf. Coat. Technol. 142–144, 1023 (2001).CrossRefGoogle Scholar
3Shiao, M.H., Kao, S.A. and Shieu, F.S.: Effects of processing parameters on the microstructure and hardness of the arc-ion plated TiN on a type 304 stainless steel. Thin Solid Films 375, 163 (2000).CrossRefGoogle Scholar
4Chen, B.F., Hwang, J., Yu, G.P. and Huang, J.H.: In situ observation of the cracking behavior of TiN coating on 304 stainless steel subjected to tensile strain. Thin Solid Films 352, 173 (1999).CrossRefGoogle Scholar
5Shieu, F.S., Cheng, L.H., Sung, Y.C., Huang, J.H. and Yu, G.P.: Microstructure and coating properties of ion-plated TiN on type 304 stainless steel. Thin Solid Films 334, 125 (1998).CrossRefGoogle Scholar
6Larsson, M., Bromark, M., Hedenqvist, P. and Hogmark, S.: Deposition and mechanical properties of multilayered PVD Ti-TiN coatings. Surf. Coat. Technol. 76–77, 202 (1996).Google Scholar
7Durusoy, H.Z., Duyar, O., Aydinli, A. and Ay, F.: Influence of substrate temperature and bias voltage on the optical transmittance of TiN films. Vacuum 70, 21 (2003).CrossRefGoogle Scholar
8Talyansky, V., Vispute, R.D., Ramesh, R., Sharma, R.P., Venkatesan, T., Li, Y.X., Salamanca-Riba, L.G., Wood, M.C., Lareau, R.T., Jones, K.A. and Iliadis, A.A.: Fabrication and characterization of epitaxial AlN/TiN bilayers on sapphire. Thin Solid Films 323, 37 (1998).CrossRefGoogle Scholar
9Chai, H., Lawn, B. and Wuttiphan, S.: Fracture modes in brittle coatings with large interlayer modulus mismatch. J. Mater. Res. 14, 3805 (1999).CrossRefGoogle Scholar
10Saha, R. and Nix, W.D.: Effects of the substrate on the determination of thin film mechanical properties by nanoindentation. Acta Mater. 50, 23 (2002).CrossRefGoogle Scholar
11Oliver, W.C. and Pharr, G.M.: An improved technique for determination hardness and elastic modulus load and displacement sensing indentation experiments. J. Mater. Res. 7, 1564 (1992).CrossRefGoogle Scholar
12Wittling, M., Bendavid, A., Martin, P.J. and Swain, M.V.: Influence of thickness and substrate on the hardness and deformation of TiN films. Thin Solid Films 270, 283 (1995).CrossRefGoogle Scholar
13Swain, M.V. and Wittling, M.: Comparison of acoustic emission from pointed and spherical indentation of TiN films on silicon and sapphire. Surf. Coat. Technol. 76–77, 528 (1995).CrossRefGoogle Scholar
14Christian, J.W. and Mahajan, S.: Deformation twinning. Prog. Mater. Sci. 39, 1 (1995).CrossRefGoogle Scholar
15Nowak, R., Sekino, T., Maruno, S. and Niihara, K.: Deformation of sapphire induced by a spherical indentation on the (10¯10) plane. Appl. Phys. Lett. 68, 1063 (1996).CrossRefGoogle Scholar
16Nowak, R. and Sakai, M.: The anisotropy of surface deformation of sapphire: Continuous indentation of triangular indenter. Acta Mater. 42, 2879 (1994).CrossRefGoogle Scholar
17Nowak, R., Sekino, T. and Niihara, K.: Non-linear surface deformation of the plane of sapphire: Identification of the linear features around spherical impressions. Acta Mater. 47, 4329 (1999).CrossRefGoogle Scholar
18Tymiak, N.I., Daugela, A., Wyrobek, T.J. and Warren, O.L.: Acoustic emission monitoring of the earliest stages of contact-induced plasticity in sapphire. Acta Mater. 52, 553 (2004).CrossRefGoogle Scholar
19Nowak, R., Li, C.L. and Swain, M.V.: Comparison of implantation with Ni2+ and Au2+ ions on the indentation response of sapphire. Mater. Sci. Eng. A 253, 167 (1998).CrossRefGoogle Scholar