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In situ scanning electron microscopy indentation studies on multilayer nitride films: Methodology and deformation mechanisms

Published online by Cambridge University Press:  31 January 2011

K.A. Rzepiejewska-Malyska ,
W.M. Mook ,
M. Parlinska-Wojtan ,
J. Hejduk  and
J. Michler
K.A. Rzepiejewska-Malyska*
Affiliation:
EMPA, Materials Science and Technology—Laboratory for Mechanics of Materials and Nanostructures, Thun CH-3602, Switzerland
W.M. Mook
Affiliation:
EMPA, Materials Science and Technology—Laboratory for Mechanics of Materials and Nanostructures, Thun CH-3602, Switzerland
M. Parlinska-Wojtan
Affiliation:
EMPA, Materials Science and Technology—Laboratory for Mechanics of Materials and Nanostructures, Thun, BE Switzerland
J. Hejduk
Affiliation:
Polish Academy of Sciences—Institute of Electron Technology, Warsaw, Poland
J. Michler
Affiliation:
EMPA, Materials Science and Technology—Laboratory for Mechanics of Materials and Nanostructures, Thun, BE Switzerland
*
a) Address all correspondence to this author. e-mail: Karolina.Rzepiejewska@empa.ch
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Abstract

Systematic studies of the deformation mechanisms of multilayer transition metal nitride coatings TiN/CrN, TiN/NbN, and NbN/CrN, and corresponding reference coatings of TiN, NbN, and CrN deposited by a direct current (dc) magnetron sputtering process onto silicon 〈100〉 have been performed. Mechanical characterization was conducted using a combination of microindentation and nanoindentation in the load range 30 to 150 mN and 0.5 to 3.5 mN, respectively. For both load ranges, scanning electron microscopy (SEM) in situ indentation was used to observe the indentation process including any pileup, sink-in, and fracture mechanisms specific to each coating. The coatings’ microstructure, both before and after indentation, was analyzed using transmission electron microscopy (TEM). It was possible to both correlate the indentation load–displacement response to surface roughness effects and fracture modes (substrate and film cracking) and observe deformation mechanisms within the coatings.

Keywords

NanoindentationScanning electron microscopy (SEM)Thin film
Type
Articles
Information
Journal of Materials Research , Volume 24 , Issue 3 , March 2009 , pp. 1208 - 1221
Copyright
Copyright © Materials Research Society 2009

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References

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