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Indentation-induced phase transformations in silicon as a function of history of unloading

Published online by Cambridge University Press:  31 January 2011

N. Fujisawa ,
R.T. Keikotlhaile ,
J.E. Bradby  and
J.S. Williams
N. Fujisawa*
Affiliation:
Department of Electronic Materials Engineering, Research School of Physical Sciences and Engineering, Australian National University, Canberra, ACT 0200, Australia
R.T. Keikotlhaile
Affiliation:
Department of Electronic Materials Engineering, Research School of Physical Sciences and Engineering, Australian National University, Canberra, ACT 0200, Australia
J.E. Bradby
Affiliation:
Department of Electronic Materials Engineering, Research School of Physical Sciences and Engineering, Australian National University, Canberra, ACT 0200, Australia
J.S. Williams
Affiliation:
Department of Electronic Materials Engineering, Research School of Physical Sciences and Engineering, Australian National University, Canberra, ACT 0200, Australia
*
a)Address all correspondence to this author. e-mail: naoki.fujisawa@anu.edu.au
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Abstract

A crystalline silicon surface, loaded by a Berkovich indenter to a constant maximum load, was unloaded using three unload functions, each consisting of five linear segments of equal time period. The first function had an exponentially decaying unload rate and was found to promote a pop-out event more readily than the second function, having a linear unload rate, or the third case with its unload rate increasing with time. Statistical analyses of experimental data suggest that the unload rate within 20%–30% of the maximum load, when the mean contact pressure in the indent volume is roughly 5 to 6 GPa, is the most dominant factor influencing the probabilistic occurrence of a pop-out event. Unload rates at higher load levels were shown to have a much less significant effect on the probability of pop-out occurrence.

Keywords

Nano-indentationPhase transformationSi
Type
Articles
Information
Journal of Materials Research , Volume 23 , Issue 10 , October 2008 , pp. 2645 - 2649
Copyright
Copyright © Materials Research Society 2008

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References

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