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Influence of ligand groups in Ti precursors on phase transformation and microstructural evolution of TiO2 thin films prepared by the wet chemical process

Published online by Cambridge University Press:  31 January 2011

Chu-Chi Ting  and
San-Yuan Chen
Chu-Chi Ting
Affiliation:
Department of Materials Science and Engineering, National Chiao-Tung University, Hsinchu, Taiwan 300, Republic of China
San-Yuan Chen*
Affiliation:
Department of Materials Science and Engineering, National Chiao-Tung University, Hsinchu, Taiwan 300, Republic of China
*
a)Address all correspondence to this author. e-mial: sychen@cc.nctu.edu.tw
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Abstract

TiO2 thin films prepared by metalorganic decomposition (MOD-TiO2) and sol-gel processes (SG-TiO2) were investigated in terms of the anatase-to-rutile phase transformation and microstructural evolution. It was found that the chemical reactivity of the ligand groups initially coordinated on the titanium precursor plays a decisive role in the structure development of as-deposited SG- and MOD-TiO2 films. MOD-TiO2 films consist of small aggregated particles and therefore, tend to coalesce together to form an inhomogeneous microstructure during the anatase-to-rutile phase transformation. On the other hand, SG-TiO2 films consist of uniform large particles that tend to grow homogeneously. MOD-TiO2 films showed a higher crystallization temperature than the SG-TiO2 films but the temperature of the anatase-to-rutile phase transformation is much lower in MOD- (approximately 775 °C) as compared to SG-TiO2 films (approximately 930 °C). The activation energy (Q) was estimated as 524 and 882 kJ/mol for the MOD- and SG-TiO2 films, respectively. The lower transformation temperature and activation energy in MOD-TiO2 films were due to smaller grain size and more potential nucleation sites existing in the un-transformed MOD-TiO2 film structure, which can accelerate the rate of anatase-to-rutile transformation.

Type
Articles
Information
Journal of Materials Research , Volume 16 , Issue 6 , June 2001 , pp. 1712 - 1719
Copyright
Copyright © Materials Research Society 2001

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