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Mechanical properties of vertically aligned single-crystalline silicon nanowire arrays

Published online by Cambridge University Press:  05 May 2011

Ana Cuevas ,
Enrique Ariel Dalchiele ,
Ricardo Marotti ,
Dietmar Leinen ,
José Ramón Ramos-Barrado  and
Francisco Martin
Ana Cuevas
Affiliation:
Laboratorio de Materiales y Superficie (Unidad Asociada al CSIC), Departamentos de Física Aplicada & Ingeniería Química, Universidad de Málaga, Málaga 29071, Spain
Enrique Ariel Dalchiele
Affiliation:
Instituto de Física, Facultad de Ingeniería, Herrera y Reissig 565, C.C. 30, 11000 Montevideo, Uruguay
Ricardo Marotti
Affiliation:
Instituto de Física, Facultad de Ingeniería, Herrera y Reissig 565, C.C. 30, 11000 Montevideo, Uruguay
Dietmar Leinen
Affiliation:
Laboratorio de Materiales y Superficie (Unidad Asociada al CSIC), Departamentos de Física Aplicada & Ingeniería Química, Universidad de Málaga, Málaga 29071, Spain
José Ramón Ramos-Barrado
Affiliation:
Laboratorio de Materiales y Superficie (Unidad Asociada al CSIC), Departamentos de Física Aplicada & Ingeniería Química, Universidad de Málaga, Málaga 29071, Spain
Francisco Martin*
Affiliation:
Laboratorio de Materiales y Superficie (Unidad Asociada al CSIC), Departamentos de Física Aplicada & Ingeniería Química, Universidad de Málaga, Málaga 29071, Spain
*
a)Address all correspondence to this author. e-mail: marjim@uma.es
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Abstract

Single-crystalline p-type silicon nanowire (SiNW) arrays have been formed by electroless metal deposition on a silicon wafer piece in an ionic Ag/fluorhydric acid (HF) solution through selective etching. They display mechanical properties that are different from those of both bulk silicon and single SiNWs. As any practical application of these materials is likely to involve a large number of nanowires in close proximity to each other, it is necessary to understand the mechanical properties of SiNW arrays. In this work, as a first step to characterize their mechanical properties, the buckling instabilities of the surfaces formed by vertically aligned SiNWs have been studied by nanoindentation tests.

Keywords

NanoindentationSiNanostructure

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Type
Articles
Information
Journal of Materials Research , Volume 26 , Issue 9 , 14 May 2011 , pp. 1091 - 1099
Copyright
Copyright © Materials Research Society 2011

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