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Microprobe Raman spectroscopy of TiN coatings oxidized by solar beam heat treatment

Published online by Cambridge University Press:  03 March 2011

M. Franck ,
J-P. Celis  and
J.R. Roos
M. Franck
Affiliation:
Department of Metallurgy and Materials Engineering, Katholieke Universiteit Leuven, B-3001 Leuven, Belgium
J-P. Celis
Affiliation:
Department of Metallurgy and Materials Engineering, Katholieke Universiteit Leuven, B-3001 Leuven, Belgium
J.R. Roos
Affiliation:
Department of Metallurgy and Materials Engineering, Katholieke Universiteit Leuven, B-3001 Leuven, Belgium
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Abstract

Physical vapor deposited TiN coatings oxidized by solar beam heat treatment in air were examined by microprobe Raman spectroscopy. The Raman spectra of TiN treated at 400 °C indicated incipient oxidation by the presence of anatase TiO2 and additionally showed a broadband feature around the forbidden TiN vibrational mode. Inhomogeneous mixtures of rutile TiO2 and small amounts of anatase polymorph (< 10%) were detected for the treatments at 600 °C only during the initial stage of oxidation. Prolonged treatment at 600 °C resulted in a complete anatase-to-rutile conversion. Rutile was identified as the single product of oxidation of the TiN samples treated at 800 °C. Peak analysis of the rutile spectra revealed no substantial spectral shifts, demonstrating an oxide growth of nearly stoichiometric rutile with an estimated composition in the range of TiO2±0.02. The Raman scattered light intensity could be correlated with the rutile layer thickness.

Type
Articles
Information
Journal of Materials Research , Volume 10 , Issue 1 , January 1995 , pp. 119 - 125
Copyright
Copyright © Materials Research Society 1995

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