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Nanotribological and nanomechanical properties of plasma-polymerized polyterpenol thin films

Published online by Cambridge University Press:  04 November 2011

Kateryna Bazaka  and
Mohan V. Jacob
Kateryna Bazaka
Affiliation:
Electronic Materials Research Lab, School of Engineering and Physical Sciences, James Cook University, Townsville, Queensland 4811, Australia
Mohan V. Jacob*
Affiliation:
Electronic Materials Research Lab, School of Engineering and Physical Sciences, James Cook University, Townsville, Queensland 4811, Australia
*
a)Address all correspondence to this author. e-mail: Mohan.Jacob@jcu.edu.au
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Abstract

Organic plasma polymers are currently attracting significant interest for their potential in the areas of flexible optoelectronics and biotechnology. Thin films of plasma-polymerized polyterpenol fabricated under varied deposition conditions were studied using nanoindentation and nanoscratch analyses. Coatings fabricated at higher deposition power were characterized by improved hardness, from 0.33 GPa for 10 W to 0.51 GPa for 100 W at 500-μN load, and enhanced wear resistance. The elastic recovery was estimated to be between 0.1 and 0.14. Coatings deposited at higher RF powers also showed less mechanical deformation and improved quality of adhesion. The average (Ra) and root mean square (Rq) surface roughness parameters decreased, from 0.44 nm and 0.56 nm for 10 W to 0.33 nm and 0.42 nm for 100 W, respectively.

Keywords

Plasma-enhanced CVDNanoindentationThin film
Type
Articles
Information
Journal of Materials Research , Volume 26 , Issue 23 , 14 December 2011 , pp. 2952 - 2961
Copyright
Copyright © Materials Research Society 2011

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