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Photoinduced formation of thin-film structures in titanium alkoxides via direct deposition from solution and from spin-coated solid-state precursor films

Published online by Cambridge University Press:  11 March 2011

Z.V. Schneider ,
J.D. Musgraves ,
K. Simmons-Potter ,
B.G. Potter Jr.  and
T.J. Boyle
Z.V. Schneider
Affiliation:
University of Arizona, Tucson, Arizona 85721-0104
J.D. Musgraves
Affiliation:
University of Arizona, Tucson, Arizona 85721-0104
K. Simmons-Potter*
Affiliation:
University of Arizona, Tucson, Arizona 85721-0104
B.G. Potter Jr.
Affiliation:
University of Arizona, Tucson, Arizona 85721-0104
T.J. Boyle
Affiliation:
Sandia National Laboratories, Advanced Materials Laboratory, Albuquerque, New Mexico 87106
*
a)Address all correspondence to this author. e-mail: kspotter@ece.arizona.edu
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Abstract

The photoinduced formation of thin film structures from a Ti-alkoxide precursor (OPy)2Ti(TAP)2, where OPy = OC6H6N, TAP = OC6H2[CH2N(CH3)2]3-2,4,6, was demonstrated via direct deposition from a pyridine-based solution and by optical illumination of a solid-state spin-coated thin film of the compound. Photopatterned physical relief structures were produced using both of these deposition methods and feature sizes as small as ∼1 μm were readily achieved. Surface investigations of the material’s nanostructure revealed that films photo-deposited from solution exhibited nanometer-scale surface roughness with evenly distributed surface porosity (∼10 nm sized pores) while films produced through the illumination of spin-coated thin films exhibited, in comparison, a reduction in surface roughness. Vibrational spectra were compared with the results of quantum chemical computations (density-functional theory) of potential photoproducts in an attempt to identify and distinguish the dominant structural groups resulting from the optical processing of each precursor form (i.e., solution versus solid-state). It was determined that ultraviolet irradiation for both thin-film formation techniques resulted in a disruption of the ligand groups, facilitating the initiation of hydrolysis and condensation reactions in the films.

Keywords

NanostructureSol-gelPhotochemical
Type
Articles
Information
Journal of Materials Research , Volume 26 , Issue 6 , 28 March 2011 , pp. 754 - 762
Copyright
Copyright © Materials Research Society 2011

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