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Silicon oxycarbide glasses: Part I. Preparation and chemistry

Published online by Cambridge University Press:  31 January 2011

Gary M. Renlund ,
Svante Prochazka  and
Robert H. Doremus
Gary M. Renlund
Affiliation:
General Electric Corporate Research, Schenectady, New York 12301
Svante Prochazka
Affiliation:
General Electric Corporate Research, Schenectady, New York 12301
Robert H. Doremus
Affiliation:
Materials Engineering Department, Rensselaer Polytechnic Institute, Troy, New York 12180–3590
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Abstract

Silicone polymers were pyrolyzed to form silicon oxycarbides that contained only silicon, oxygen, and carbon. The starting polymers were mainly methyl trichlorosilane with a small amount of dimethyl dichlorosilane. NMR showed that the polymers had a silicon-oxygen backbone with branching and ring units. When the polymer was heated in hydrogen, toluene and isopropyl alcohol, used in production of the polymer, were given off in the temperature range 150 °C to 500 °C. Substantial decomposition of the polymer itself began only above about 700°by evolution of methane. The network of silicon-oxygen bonds and silicon-carbon bonds did not react and was preserved; the silicon-carbon bonds were linked into the silicon-oxygen network. The silicon oxycarbide was stable above 1000 °C, showing no dimensional changes above this temperature. The interior of the silicon oxycarbide was at very low effective oxygen pressure because oxygen diffused slowly in it. There was also a protective layer of silicon dioxide on the surface of the silicon oxycarbide.

Type
Articles
Information
Journal of Materials Research , Volume 6 , Issue 12 , December 1991 , pp. 2716 - 2722
Copyright
Copyright © Materials Research Society 1991

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