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Size effect on the mechanical properties of microfabricated polysilicon thin films

Published online by Cambridge University Press:  31 January 2011

J. N. Ding ,
Y. G. Meng  and
S. Z. Wen
J. N. Ding
Affiliation:
National Tribology Laboratory, Tsinghua University, Beijing, 100084, People's Republic of China
Y. G. Meng
Affiliation:
National Tribology Laboratory, Tsinghua University, Beijing, 100084, People's Republic of China
S. Z. Wen
Affiliation:
National Tribology Laboratory, Tsinghua University, Beijing, 100084, People's Republic of China
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Abstract

A new microtensile test device using a magnetic-solenoid force actuator was developed to evaluate the mechanical properties of microfabricated polysilicon thin films that were 100–660 mm long, 20–200 μm wide, and 2.4-μm thick. It was found that the measured average value of Young's modulus, 164 GPa ± 1.2 GPa, falls within the theoretical bounds. The average fracture strength is 1.36 GPa with a standard deviation of 0.14 GPa, and the Weibull modulus is 10.4–11.7. Statistical analysis of the specimen size effects on the tensile strength predicated the size effects on the length, the surface area, and the volume of the specimens. The fracture strength increases with an increase of the ratio of surface area to volume. In such cases, the size effect can be corrected to the ratio of the surface area to volume as the governing parameter. The test data accounts for the uncertainties in mechanical properties and may be used to enhance the reliability and design of polysilicon microelectromechanical systems devices.

Type
Articles
Information
Journal of Materials Research , Volume 16 , Issue 8 , August 2001 , pp. 2223 - 2228
Copyright
Copyright © Materials Research Society 2001

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References

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