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A study of texture in diamond films as functions of methane concentration during chemical vapor deposition and post-growth hydrogen treatment

Published online by Cambridge University Press:  03 March 2011

D. Ganesana  and
S.C. Sharma
D. Ganesana
Affiliation:
Department of Physics and Materials Science & Engineering Program, The University of Texas at Arlington, Arlington, Texas 76019-0059
S.C. Sharma
Affiliation:
Department of Physics and Materials Science & Engineering Program, The University of Texas at Arlington, Arlington, Texas 76019-0059
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Abstract

We have studied effects of hydrogen on texture in diamond films grown by hot filament assisted chemical vapor deposition by utilizing x-ray diffraction (XRD). We present results for the relative intensities of the XRD peaks originating from the (111). (220), and (400) crystallographic planes as functions of CH4/H2 makeup during growth and post-growth H2 treatment of the films. The texture of the films can be controlled by varying composition of the CH4/H2 mixture during growth and also by subjecting films to hydrogen treatment. The complementary characterization of these films by XRD, Raman spectroscopy, and positron annihilation techniques exemplifies a correlation among film texture, diamond contcnt, and dcnsity of the microvoids in the films.

Type
Articles
Information
Journal of Materials Research , Volume 10 , Issue 7 , July 1995 , pp. 1764 - 1771
Copyright
Copyright © Materials Research Society 1995

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References

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