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Three-dimensional nanostructures by focused ion beam techniques: Fabrication and characterization

Published online by Cambridge University Press:  19 November 2013

Wuxia Li ,
Changzhi Gu ,
Ajuan Cui ,
J.C. Fenton ,
Qianqing Jiang ,
P.A. Warburton  and
Tiehan H. Shen
Wuxia Li*
Affiliation:
Laboratory of Microfabrication, Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China
Changzhi Gu*
Affiliation:
Laboratory of Microfabrication, Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China
Ajuan Cui
Affiliation:
Laboratory of Microfabrication, Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China
J.C. Fenton
Affiliation:
Department of Electrical Engineering, London Center for Nanotechnology, University College London, London WC1E 7JE, United Kingdom
Qianqing Jiang
Affiliation:
Laboratory of Microfabrication, Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China
P.A. Warburton
Affiliation:
Department of Electrical Engineering, London Center for Nanotechnology, University College London, London WC1E 7JE, United Kingdom
Tiehan H. Shen
Affiliation:
Joule Physics Laboratory, University of Salford, Manchester M5 4WT, United Kingdom
*
a)Address all correspondence to these authors. e-mail: liwuxia@aphy.iphy.ac.cn
b)e-mail: czgu@aphy.iphy.ac.cn
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Abstract

Three-dimensional (3D) nanostructures and nanodevices have attracted tremendous interest in the past few years due to their special mechanical and physical properties. Nanodevices using 3D nanostructures as the building blocks have been demonstrated to exhibit multifunctionality and functions that conventional planar devices cannot achieve. In this article, we report and review focused ion beam techniques for direct site-specific growth of 3D nanostructures and postgrowth shape modification of freestanding nanostructures by ion beam-induced chemical vapor deposition and ion-beam-irradiation-induced plastic bending, respectively. Such techniques have shown nanometer-scale resolution and accuracy in the fabrication of metallic nanoelectrodes, 3D pickup coils, nanogaps, and multibranched structures. Characterization of the resulting nanostructures shows that focused ion beam techniques allow conducting and superconducting freestanding 3D structures to be tailored in size, geometry, and integrated with planar electronic, mechanical, and superconducting nanodevices, potentially enabling lab-on-a-chip experiments.

Type
Invited Feature Papers
Information
Journal of Materials Research , Volume 28 , Issue 22 , 28 November 2013 , pp. 3063 - 3078
Copyright
Copyright © Materials Research Society 2013 

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References

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