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The use of reliability factors in analyzing powder patterns in Pt–Si sputtering targets and subsequent films

Published online by Cambridge University Press:  31 January 2011

Abdul Rahman ,
Walter P. Lowe  and
Clayton W. Bates Jr
Abdul Rahman
Affiliation:
Department of Physics and Astronomy, Howard University, Washington, DC 20059
Walter P. Lowe
Affiliation:
Department of Physics and Astronomy, Howard University, Washington, DC 20059
Clayton W. Bates Jr
Affiliation:
Materials Science Research Center of Excellence, Department of Electrical Engineering, Howard University, Washington, DC 20059
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Abstract

X-ray powder diffraction was used to characterize a Pt–Si sputtering target and subsequent films. The powder patterns of each sample indicated lines due to diffraction from different phases. We have initiated a preliminary study through which we have analyzed and characterized these films. The results presented for these samples corroborate with results observed for this system in the planar configuration.

Type
Articles
Information
Journal of Materials Research , Volume 13 , Issue 6 , June 1998 , pp. 1517 - 1521
Copyright
Copyright © Materials Research Society 1998

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References

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