Hostname: page-component-78c5997874-g7gxr Total loading time: 0 Render date: 2024-11-10T13:34:24.215Z Has data issue: false hasContentIssue false

An Investigation of Suspension Phenomena of a Large Glass Substrate in a Vertical Transportation by the Arbitrary Lagrangian and Eulerian Method

Published online by Cambridge University Press:  14 November 2013

W.-S. Fu*
Affiliation:
Department of Mechanical Engineering, National Chiao Tung University, Hsinchu, Taiwan 30010, R.O.C.
Y.-C. Lai
Affiliation:
Department of Mechanical Engineering, National Chiao Tung University, Hsinchu, Taiwan 30010, R.O.C.
Y. Huang
Affiliation:
Department of Mechanical Engineering, National Chiao Tung University, Hsinchu, Taiwan 30010, R.O.C.
S.-H. Huang
Affiliation:
Department of Mechanical Engineering, National Chiao Tung University, Hsinchu, Taiwan 30010, R.O.C.
Get access

Abstract

For economizing the space of equipment and increasing the throughput of product, a vertical transportation is usually used for manufacturing a large and thin glass substrate. Due to the fragile characteristic of the large and thin glass substrate, investigation of a method for maintaining the glass substrate stably and safely on a supporting frame during manufacturing processes becomes an important subject. This subject belongs to a kind of moving boundary problem and the method of Arbitrary Lagrangian Eulerian (ALE) with a finite element scheme is suitably used to solve it. Also, related methods of the generalized minimal residual method (GMRES) and pressure convection diffusion method are adopted to calculate pneumatic pressures distributed on the glass substrate. The results show that under a low frequency of the vertical transportation the glass substrate stably lies on the supporting frame, oppositely under a high frequency of the vertical transportation the glass substrate has possibility to depart from the supporting frame. The later situation is disadvantageous to the glass substrate and should be avoided as much as possible.

Type
Research Article
Copyright
Copyright © The Society of Theoretical and Applied Mechanics, R.O.C. 2013 

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1.Kim, Y. W., Lee, S. M., Park, J. W., Kim, H. S., Moon, Y. H. and Lee, D. W., “Design of Air Bearing for CCD Inspection of the Flexible Patterned Plates,” The 2nd International Conference on Positioning Technology, pp. 112115 (2006).Google Scholar
2.Amano, K., Yoshimoto, S., Miyatake, M. and Hirayama, T., “Basic Investigation of Noncontact Transportation System for Large TFT-LCD Glass Sheet Used in CCD Inspection Section,” Journal of International Societies for Precision Engineering and Nanotechnology, 35, pp. 5864 (2011).Google Scholar
3.Im, I.-T., Jun, H. J. and Kim, K. S., “Numerical Study on the Air-Cushion Glass Transportation Unit for LCD Panels,” Journal of the Semiconductor and Display Equipment Techniques, 5, pp. 2731 (2006).Google Scholar
4.Im, I.-T., Jeon, H. J., Kim, K. S. and Park, K.-W., “Optimization of the LCD Panel Air-Cushion Transportation Unit Using Computational Fluid Dynamics,” The 2nd International Symposium on Micro and Nano Technology, Hsinchu, Taiwan (2006).Google Scholar
5.Jeon, H. J., Kim, K. S. and Im, I.-T., “Numerical Study on the Air-Cushion Unit for Transportation of Large-Sized Glass Plate,” Journal of the Semiconductor and Display Equipment Techniques, 6, pp. 5964 (2007).Google Scholar
6.Im, I.-T., Park, C. W. and Kim, K. S., “A Numerical Study on the Flow and Heat Transfer Characteristics in a Noncontact Glass Transportation Unit,” Journal of Mechanical Science and Technology, 23, pp. 34163423 (2009).CrossRefGoogle Scholar
7.Saad, Y. and Schultz, M., “GMRES: A Generalized Minimum Residual Algorithm for Solving Nonsym-Metric Linear Systems,” SIAM Journal of Sciences Status Computing, 7, pp. 856869 (1986).CrossRefGoogle Scholar
8.Elman, H. C., Silvester, D. J. and Wathen, A. J., Finite Elements and Fast Iterative Solvers, Oxford University Press, Oxford (2005).Google Scholar
9.Elman, H. C. and Tuminaro, R., “Boundary Conditions in Approximate Commutator Preconditioned for the Navier-Stokes Equations,” ETNA 35, pp. 257280 (2009).Google Scholar
10.Elman, H. C., Howle, V. E., Shadid, J., Shuttleworth, R. and Tuminaro, R., “Block Preconditioners Based on Approximate Commutators,” SIAM Journal of Sciences Status Computing, 27, pp. 16511668 (2006).Google Scholar
11.Elman, H. C., Loghin, D. and Wathen, A. J., “Preconditioning Techniques for Newton's Method for the Imcompressible Navier-Stokes Equations,” BIT, 43, pp. 961974 (2003).CrossRefGoogle Scholar