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Design and Development of a Piezoelectric Actuator for the Scanning Probe Microscope Used in Ultrahigh Vacuum

Published online by Cambridge University Press:  05 May 2011

K.-Y. Huang  and
C.-J. Lee
K.-Y. Huang*
Affiliation:
Department of Mechanical Engineering, National Taiwan University, Taipei, Taiwan 10617, R.O.C.
C.-J. Lee*
Affiliation:
Department of Mechanical Engineering, National Taiwan University, Taipei, Taiwan 10617, R.O.C.
*
*Associate Professor
**Master of Science
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Abstract

This paper is to present the design and development of a piezoelectric actuator for SPM in ultrahigh vacuum (10−7∼10−9 Torr). The measuring probe is installed on a precise scanning actuator, which is further driven by a fast approaching actuator. The precise scanning actuator composed of a piezo-tube with segmented electrodes can realize 3-D precise scanning motions at subnanometer level to move the measuring probe over the measured surface. Because of its stable and smooth actuating behavior, the inchworm actuating principle is selected for the fast approaching actuator, which is build up with two controllable clamping devices and an actuating device. Diverse flexure mechanisms are applied in the actuator to attain frictionless guiding and recovery functions. To realize balanced clamping forces on the scanning tube, each clamping device is integrated with a fine regulating mechanism for clamping force. By applying the theoretical model and the finite element analysis, the relations between force and deflection inside the actuator were investigated to validate its function. The developed actuator has sustained the severe baking and pumping process, and their function and performance were verified experimentally in ultrahigh vacuum.

Keywords

Scanning probe microscopyUltrahigh vacuumPiezoelectric actuatorFine regulating mechanism
Type
Articles
Information
Journal of Mechanics , Volume 23 , Issue 2 , June 2007 , pp. 117 - 126
Copyright
Copyright © The Society of Theoretical and Applied Mechanics, R.O.C. 2007

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References

1.Binnig, G. and Rohrer, H., “Surface Studies by Scanning Tunneling Microscopy,” Physical Review Letters, 49(1), pp. 57–61 (1982).CrossRefGoogle Scholar
2.Binnig, G. and Rohrer, H., “The Scanning Tunneling Microscope,” Scientific American, 253, pp. 50–56 (1985).Google Scholar
3.O'Hanlon, J. F., A User's Guide to Vacuum Technology, John Wiley and Sons, New York (1982).Google Scholar
4.Hwang, I. S. and Chang, C. S., http://www.phys.sinica. edu.tw/%7Enano/stm.htmGoogle Scholar
5.Uchino, K., “Recent Trend of Piezoelectric Actuator Developments,” Proceedings of the International Symposium on Micro Machine and Human Science, pp. 3–9 (1999).Google Scholar
6.Bexell, M. and Johansson, S., “Fabrication and Evaluation of a Piezoelectric Miniature Motor,” Sensors and Actuators A, 75, pp. 8–16 (1998).CrossRefGoogle Scholar
7.Suzuki, Y., Tani, K. and Sakuhara, T., “Development of a New Type Piezoelectric Micromotor,” Sensors and Actuators A, 83, pp. 244–248 (2000).Google Scholar
8. Nanomotion company: http://www.nanomotion.com/ techback.htmlGoogle Scholar
9.Mariotto, G., D'Angelo, M., Kresnin, J. and Shevets, I.V., “Study of The Dynamic Behaviour of a Piezo-Walker,” Applied Surface Science, 144–145, pp. 530–533 (1999).CrossRefGoogle Scholar
10.Hemsel, T. and Wallaschek, J., “Survey of the Present State of The Art of Piezoelectric Linear Motors,” Ultrasonics, 38, pp. 37–40 (2000).CrossRefGoogle ScholarPubMed
11. Burleigh Company: http://www.burleigh.com.Google Scholar
12.Ganz, E., Theiss, S., Hwang, I.-S. and Golovchenko, J., “Direct Measurement of Diffusion by Hot Tunneling Microscopy: Activation Energy, Anisotropy, and Long Jumps,” Phys. Rev. Lett., 68, pp. 1567–1570 (1992).Google Scholar
13.Chang, T. J., Scanning Tunneling Microscopy Study ofGe Epitaxial growth on Monolayer of Pb Covered Si (111) Substrate, Ph.D. Dissertation, Department of Electrical Engineering, National Taiwan University, Taiwan (1999).Google Scholar
14.Shang, G., Qiu, X., Wang, C. and Bai, C., “Piezoelectric Push-Pull Micropositioner for Ballistic Electron Emission Microscope,” Rev. Sci. Instrum., 68, pp. 3803–3805 (1997).CrossRefGoogle Scholar
15.Pond, K., Nosho, B. Z., Stuber, H. R., Gossard, A. C. and Weinberg, W. H. A., “Two-Dimensional Ultrahigh Vacuum Positioner for Scanning Tunneling Microscopy,” Rev. Sci. Instrum., 69(3), pp. 1403–1405 (1998).CrossRefGoogle Scholar
16.Li, Y., Guo, M., Zhou, Z. and Hu, M., “Micro Electro Discharge Machine with an Inchworm Type of Micro Feed Mechanism,” Precision Engineering, 26, pp. 7–14 (2002).Google Scholar
17.Tarn, J.-Q. and Chang, H.-H., “Effective Lengths of Tensile and Torsional Specimens of Piezoelectric Materials,” Journal of Mechanics, 22, pp. 27–34 (2006).CrossRefGoogle Scholar
18.Yang, X.-H., Zahang, Y., Hu, Y. -T. and Chen, C. -Y., “Continuum Damage Mechanics for Thermo-Piezoelectric Materials,” Journal of Mechanics, 22, pp. 93–98 (2006).CrossRefGoogle Scholar
19.Paros, J. M. and Weisbord, L., “Flexure Hinges,” Machine Design, 27, pp. 151–156 (1965).Google Scholar