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A Mechanical Beam Resonator Engineered at Nanoscale for Ultralow Thermoelastic Damping

Published online by Cambridge University Press:  02 July 2018

N. D. Vy ,
N. V. Cuong  and
C. M. Hoang
N. D. Vy
Affiliation:
Theoretical Physics Research Group Advanced Institute of Materials Science Ton Duc Thang UniversityHo Chi Minh City, Vietnam Faculty of Applied Sciences Ton Duc Thang UniversityHo Chi Minh City, Vietnam
N. V. Cuong
Affiliation:
International Training Institute for Materials Science Hanoi University of Science and Technology Hanoi, Vietnam
C. M. Hoang*
Affiliation:
International Training Institute for Materials Science Hanoi University of Science and Technology Hanoi, Vietnam
*
*Corresponding author (hoangcm@itims.edu.vn)
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Abstract

A mechanical beam resonator engineered at nanoscale for suppressing thermoelastic damping to obtain ultrahigh quality factor is reported. The resonator employs the torsion mode of a spring beam to excite the rotation oscillation of a nanoscale resonant beam. The ultralow thermoelastic damping in the resonator is obtained by employing torsion oscillation. Optimal study of thermoelastic damping is carried out by varying the dimensional parameters of the resonator. The resonator operating in the MHz regime with the quality factor over one million is obtainable by the proposed oscillation exciting method and appropriate design of dimensional parameters of the beams. In order to obtain such overall intrinsic quality factor, virtual supports are employed to eliminate attachment loss in the resonator.

Keywords

Mechanical beam resonatorTorsional oscillationUultralow thermoelastic dampingIntrinsic damping.
Type
Research Article
Information
Journal of Mechanics , Volume 35 , Issue 3 , June 2019 , pp. 351 - 358
Copyright
© The Society of Theoretical and Applied Mechanics 2018 

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References

REFERENCES

Ekinci, K. L., “Electromechanical Transducers at the Nanoscale: Actuation and Sensing of Motion in Nanoelectromechanical Systems (NEMS),” Small, 1, pp. 786–797 (2005).Google Scholar
Xu, Y., Lin, J. T., Alphenaar, B. W. and Keynton, R. S., “Viscous Damping of Microresonators for Gas Composition Analysis,” Applied Physics Letters, 88, 143513 (2006).Google Scholar
Beek, J. T. M. V. and Puers, R., “A Review of MEMS Oscillators for Frequency Reference and Timing Applications,” Journal of Micromechanics and Microengineering, 22, 013001 (2012).Google Scholar
Li, M., Tang, H. X. and Roukes, M., “Ultra-Sensitive NEMS-Based Cantilevers for Sensing, Scanned Probe and Very High-Frequency Applications,” Nature Nanotechnology, 2, pp. 114–120 (2007).Google Scholar
Connell, A. D. O. et al., “Quantum Ground State and Single-Phonon Control of a Mechanical Resonator,” Nature, 464, pp. 697–703 (2010).Google Scholar
Liu, X. et al., “On the Modes and Loss Mechanisms of a High Q Mechanical Oscillator,” Applied Physics Letters, 78, 1346 (2001).Google Scholar
Bao, M. and Yang, H., “Squeeze Film Air Damping in MEMS,” Sensors and Actuators. A, Physical, 136, pp. 3–27 (2007).Google Scholar
Photiadis, D. M. and Judge, J. A., “Attachement Losses of High Q Oscillators,” Applied Physics Letters, 85, pp. 482–484 (2004).Google Scholar
Yi, Y. B. and Matin, M. A., “Eigenvalue Solution of Thermoelastic Damping in Beam Resonators Using a Finite Element Analysis,” Journal of Vibration and Acoustics, 129, pp. 478–483 (2007).Google Scholar
Zener, C., “Internal Friction in Solids, I: Theory of Internal Friction in Reeds,” Physical Review, 52, pp. 230–235 (1937).Google Scholar
Lifshitz, R. and Roukes, M. L., “Thermoelastic Damping in Micro- and Nanomechanical Systems,” Physical Review B, 61, pp. 5600–5609 (2000).Google Scholar
Mohammadi, A. K. and Ali, N. A., “Vibrational Behavior of an Electrically Actuated Micro-Beam with Thermoelastic Damping,” Journal of Mechanics, 30, pp. 219–227 (2014).Google Scholar
Evoy, S. et al., “Temperature-Dependent Internal Friction in Silicon Nanoelectromechanical Systems,” Applied Physics Letters, 77, 2397 (2000).Google Scholar
Guo, X., Yi, Y. B. and Pourkamali, S., “A Finite Element Analysis of Thermoelastic Damping in Vented MEMS Beam Resonators,” International Journal of Mechanical Sciences, 74, pp. 73–82 (2013).Google Scholar
Candler, R. N. et al., “Impact of Slot Location on Thermoelastic Dissipation in Micromechanical Resonators,” Transducers ’05, pp. 597–600 (2005).Google Scholar
Lake, J., Duwel, A. and Candler, R. N., “Particle Swarm Optimization for Design of Slotted MEMS Resonators with Low Thermoelastic Dissipation,” Journal of Microelectromechanical Systems, 23, pp. 364–371 (2013).Google Scholar
Prabhakar, S. and Vengallatore, S., “Thermoelastic Damping in Hollow and Slotted Microresonators,” Journal of Microelectromechanical Systems, 18, pp. 725–735 (2009).Google Scholar
Guo, X. and Yi, Y. B., “Suppression of Thermoelas-tic Damping in MEMS Beam Resonators by Piezo-resistivity,” Journal of Vibration and Acoustics, 333, pp. 1079–1095 (2014).Google Scholar
Doolin, C., Kim, P. H., Hauer, B. D., MacDonald, A. J. R. and Davis, J. P., “Multidimensional Optomechanical Cantilevers for High-Frequency Force Sensing,” NeW Journal of Physics, 16, 035001 (2014).Google Scholar
Comsol 4.4, COMSOL Multiphysics. https://www.comsol.com/.Google Scholar
Hao, Z., Erbil, A. and Ayazi, F., “An Analytical Model for Support Loss in Micromachined Beam Resonators with In-Plane Flexural Vibrations,” Sensors and Actuators. A, 109, 156 (2003).Google Scholar
Hassani, F. A., Tsuchiya, Y. and Mizuta, H., “Optimization of Quality-Factor for In-Plane Free-Free Nanoelectromechanical Resonators,” IET Micro & Nano Letters, 18, pp. 886–889 (2013).Google Scholar
Taş, V., Olcum, S., Aksoy, M. D. and Atalar, A. “Reducing Anchor Loss in Micromechanical Exten-sional Mode Resonators,” IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 57, pp. 448–454 (2010).Google Scholar
Wang, K., Wong, A. C. and Nguyen, C. T. C., “VHF Free-Free Beam High-Q Micromechanical Resonators,” Journal of Microelectromechanical Systems, 9, pp. 347–360 (2000).Google Scholar
Kotani, S., Hoang, C. M., Sasaki, T. and Hane, K., “Micromirrors Connected in Series for Low Voltage Operation in Vacuum,” Journal of Vacuum Science & Technology B, 31, pp. 42001–1-42001-6 (2013).Google Scholar
Chu, H. M. and Hane, K., “Design, Fabrication and Vacuum Operation Characteristics of Two-Dimensional Comb-drive Micro-Scanner,” Sensors and Actuators A, 165, pp. 422–430 (2011).Google Scholar
Kermany, A. R., Bennett, J. S., Brawley, G. A., Bowen, W. P. and Iacopi, F., “Factors Affecting the f x Q Product of 3C-SiC Microstrings: What is the Upper Limit for Sensitivity?,” Journal of Applied Physics, 119, 055304 (2016).Google Scholar
Duwel, A., Candler, R. N., Kenny, T. W. and Var-ghese, M., “Engineering MEMS Resonators with Low Thermoelastic Damping,” Journal of Microe-lectromechanical Systems, 15, pp. 1437–1445 (2006).Google Scholar
Ghaffari, S. et al., “Quantum Limit of Quality Factor in Silicon Micro and Nano Mechanical Resonators,” Scientific Reports, 3, 3244 (2013).Google Scholar