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Unsteady Analysis of Microvalves With No Moving Parts

Published online by Cambridge University Press:  05 May 2011

C.-T. Wang*
Affiliation:
Dept. of Mechanical and Electro-Mechanical Engineering, National I Lan University, I Lan, Taiwan 26047, R.O.C.
T.-S. Leu*
Affiliation:
Dept. of Aeronautics and Astronautics, National Cheng Kung University, Tainan, Taiwan 70101, R.O.C.
J.-M. Sun*
Affiliation:
Dept. of Aeronautics and Astronautics, National Cheng Kung University, Tainan, Taiwan 70101, R.O.C.
*
*Assistant Professor
**Associate Professor
***Graduate student
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Abstract

No-moving-parts valves (NMPV) pumps produce the net volume flow due to the difference of pressure resistances between forward and reverse flow of a microchannel structure. NMPV has been developed by a number of research groups. However, most of NMPV in these studies are designed and based on steady state flow conditions. Little data is available regarding the NMPV in unsteady flow conditions. In this study, the performances of NMPV under both steady and unsteady flow conditions are investigated numerically. The NMPV used in this study is a diffuser-type microchannel with diffuser angle of 20° because of its outstanding production of net volume flow. By a series of numerical simulations, some useful results would be addressed for the performance of NMPV micropumps. First, Reynolds number confirmed by steady analysis should be greater than 10 (Re > 10) for the NMPV pumps to be more effective. Second, an optimal Strouhal number with maximum net volume flow rate is found at St = 0.013 for the unsteady flow condition. In addition, the relation between the driving pressure amplitude and net volume flow rate with a linear behavior found was helpful to the performance of the micropump system. According to these findings, it was easy for users to operate and design of NMPV micropumps.

Type
Articles
Copyright
Copyright © The Society of Theoretical and Applied Mechanics, R.O.C. 2007

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References

1.Maillefer, D., van Lintel, H., Rey-Mermet, G. and Hirschi, R., “A High-Performance Silicon Micropump for an Implantable Drug Delivery System,” Proc. of the 12th IEEE MEMS 1999 Technical Digest, Orlando, FL, USA, 1/17-21/99, pp. 541546 (1999).Google Scholar
2.Richter, M., Linnemann, R. and Woias, P., “Robust Design of Gas and Liquid Micropumps,” Sensors & Actuators A68, pp. 480486(1998).CrossRefGoogle Scholar
3.van Lintel, H., van de Pol, F. and Bouwstra, S., “A Piezoelectric Micropump Based on Micromachining of Silicon,” Sensors & Actuators A15, pp. 153168 (1988).CrossRefGoogle Scholar
4.Leu, T. S. and Ma, F. C., “Novel EHD-Pump Driven Micro Mixers,” Journal of Mechanics, 21, pp. 137144 (2005).CrossRefGoogle Scholar
5.Ngyen, N. T., Huang, X. and Chuan, T. K., “MEMS-Micropumps: A Review,” Transactions of the ASME Journal of Fluids Engineering, 124(2), pp. 384392 (2002).CrossRefGoogle Scholar
6.Shoji, S. and Esashi, M., “Microflow Devices and System,” Journal of Micromechanics and Microengineering, 4, pp. 157171 (1994).CrossRefGoogle Scholar
7.Fuhr, G., Hagedorn, R., Muller, T., Benecke, W. and Wagner, B., “Pumping of Water Solution in Micro fabricated Electrohydrodynamic System,” Proc. IEEE-MEMS Workshop, pp. 25–29 (1992).CrossRefGoogle Scholar
8.Ohnstein, T., Fukjura, T., Ridley, J. and Bonne, U., “Micromachined Silicon Microvalve,” Proc. IEEE Micro Electro Mechanical Syst. Workshop, Napa Valley, CA, Feb. 11∼14, pp. 9598(1990).Google Scholar
9.Tesla, N., “Valvular Conduit,” United States Patent, Patent No. 1 329 559(1920).Google Scholar
10.Stemme, E. and Allen, G., “A Valve-Less Diffuser/ Nozzle Based Fluid Pump,” Sensors and Actuator, A39, pp. 159167(1993).CrossRefGoogle Scholar
11.Gerlach, T., Schuenmann, M. and Wurmus, H., “A New Micropump Principle of the Reciprocation Type Using Pyramidic Micro Flow Channels as Passive Valves,” Journal of Micromechanics and Microengineering, 5, pp. 199201 (1995).CrossRefGoogle Scholar