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Design of a novel high efficiency antenna for helicon plasma sources

Published online by Cambridge University Press:  17 May 2018

S. Fazelpour ,
A. Chakhmachi ,
D. Iraji  and
H. Sadeghi
S. Fazelpour
Affiliation:
Plasma Physics and Nuclear Fusion Research School, Nuclear Science and Technology Research Institute, P.O. Box 1439951113, Tehran, Iran
A. Chakhmachi*
Affiliation:
Plasma Physics and Nuclear Fusion Research School, Nuclear Science and Technology Research Institute, P.O. Box 1439951113, Tehran, Iran
D. Iraji
Affiliation:
Energy Engineering and Physics Department, Amirkabir University of Technology, P.O. Box 1591634311Tehran, Iran
H. Sadeghi
Affiliation:
Energy Engineering and Physics Department, Amirkabir University of Technology, P.O. Box 1591634311Tehran, Iran
*
†Email address for correspondence: achakhmachi@aut.ac.ir
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Abstract

A new configuration for an antenna, which increases the absorption power and plasma density, is proposed for helicon plasma sources. The influence of the electromagnetic wave pattern symmetry on the plasma density and absorption power in a helicon plasma source with a common antenna (Nagoya) is analysed by using the standard COMSOL Multiphysics 5.3 software. In contrast to the theoretical model prediction, the electromagnetic wave does not represent a symmetric pattern for the common Nagoya antenna. In this work, a new configuration for an antenna is proposed which refines the asymmetries of the wave pattern in helicon plasma sources. The plasma parameters such as plasma density and absorption rate for a common Nagoya antenna and our proposed antenna under the same conditions are studied using simulations. In addition, the plasma density of seven operational helicon plasma source devices, having a common Nagoya antenna, is compared with the simulation results of our proposed antenna and the common Nagoya antenna. The simulation results show that the density of the plasma, which is produced by using our proposed antenna, is approximately twice in comparison to the plasma density produced by using the common Nagoya antenna. In fact, the simulation results indicate that the electric and magnetic fields symmetry of the helicon wave plays a vital role in increasing wave–particle coupling. As a result, wave–particle energy exchange and the plasma density of helicon plasma sources will be increased.

Keywords

plasma applicationsplasma simulation
Type
Research Article
Information
Journal of Plasma Physics , Volume 84 , Issue 3 , June 2018 , 905840303
Copyright
© Cambridge University Press 2018 

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