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Published online by Cambridge University Press: 17 May 2001
Calculations of optimal parameters for the e-beam excited Xe spontaneous radiation source (excilamp) at λ ∼ 172 nm have been done. There have been defined optimal values of gas density and specific excitation power. Gas temperature dependence of radiation conversion efficiency related to the injected media energy have been also computed. It has been shown that there is an optimum in excitation pulse duration at frequency operation mode.