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High-precision small-scale laser focal spot measurements

Published online by Cambridge University Press:  06 February 2013

Z.W. Lu ,
X.Y. Liu ,
X. Wang ,
D.X. Ba ,
Z.H. Jiang ,
P.Y. Du  and
C.Y. Zhu
Z.W. Lu*
Affiliation:
National Key Laboratory of Science and Technology on Tunable Laser, Harbin Institute of Technology, Harbin, China
X.Y. Liu
Affiliation:
National Key Laboratory of Science and Technology on Tunable Laser, Harbin Institute of Technology, Harbin, China
X. Wang
Affiliation:
National Key Laboratory of Science and Technology on Tunable Laser, Harbin Institute of Technology, Harbin, China
D.X. Ba
Affiliation:
National Key Laboratory of Science and Technology on Tunable Laser, Harbin Institute of Technology, Harbin, China
Z.H. Jiang
Affiliation:
Changchun Institute of Optics, Fine mechanics and Physics, Chinese Academy of Sciences, Changchun, China
P.Y. Du
Affiliation:
National Key Laboratory of Science and Technology on Tunable Laser, Harbin Institute of Technology, Harbin, China
C.Y. Zhu
Affiliation:
National Key Laboratory of Science and Technology on Tunable Laser, Harbin Institute of Technology, Harbin, China
*
Address correspondence and reprint requests to: Z.W. Lu, National Key Laboratory of Science and Technology on Tunable Laser, Harbin Institute of Technology, P. O. Box 3031, Harbin 150080, China. E-mail: zw_lu@sohu.com.
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Abstract

In this paper, a method of two-dimensional fine-scanning with charge coupled device has been conducted to precisely measure spatial position and intensity distribution of small-scale focal spot (diameter in microns). The measurement accuracy of the small-scale focal spot position is better than 1 µm when the fluctuations of the light energy and background noise are relatively small. The theoretical analysis is consistent with the experimental results.

Keywords

Centroid positionCharge coupled deviceHigh-precision measurementRelative intensity distributionSmall-scale focal spot
Type
Research Article
Information
Laser and Particle Beams , Volume 31 , Issue 1 , March 2013 , pp. 177 - 183
Copyright
Copyright © Cambridge University Press 2013

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