Hostname: page-component-cd9895bd7-p9bg8 Total loading time: 0 Render date: 2024-12-26T17:16:11.139Z Has data issue: false hasContentIssue false
  • English
  • Français

Multiscale finite-element models for predicting spontaneous adhesion in MEMS

Published online by Cambridge University Press:  15 November 2010

Raffaele Ardito ,
Alberto Corigliano  and
Attilio Frangi
Get access

Abstract

This paper aims at the formulation of a computational model for the simulation of adhesion phenomena in micro-electro-mechanical systems (MEMS) under various environmental conditions. The present approach is based on finite-element (FE) simulations of a representative part of the surface. The micro-scale analyses include the contact behaviour of the asperities and different “proximity interactions” like Van der Waals and capillary forces. The model is first validated in the simple case of a sphere over a flat surface and then applied to a realistic surface sample.

Keywords

Multi-scale analysisadhesive energyMEMSMicrosystèmesélectro-mécaniques (MEMS)adhésion spontanéeeffets de capillaritéforce de Van der Waals
Type
Research Article
Information
Mechanics & Industry , Volume 11 , Issue 3-4: Giens 2009 , May 2010 , pp. 177 - 182
Copyright
© AFM, EDP Sciences 2010

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

Zhao, Y.-P., Wang, L.S., Yu, T.X., Mechanics of adhesion in MEMS – a review, J. Adh. Sci. Technol. 17 (2003) 519–546 CrossRefGoogle Scholar
de Boer, M.P., Michalske, T.A., Accurate method for determining adhesion of cantilever beams, J. Appl. Phys. 86 (1999) 817–827 CrossRefGoogle Scholar
Yu, T., Ranganathan, R., Johnson, N. et al., In situ characterization of induced stiction in a MEMS, J. Microelectromech. Syst. 16 (2006) 355–364 CrossRefGoogle Scholar
J. Israelachvili, Intermolecular and Surface Forces, Academic Press, London, 1991
Hariri, A., Zu, J.W., Ben Mrad, R., Modeling of wet stiction in microelectro-mechanical systems (MEMS), J. Microelectromech. Syst. 16 (2007) 1276–1285 CrossRefGoogle Scholar
van Spengen, W.M., Puers, R., De Wolf, I., A physical model to predict stiction in MEMS, J. Micromech. Microeng. 12 (2002) 702–713 CrossRefGoogle Scholar
Bhushan, B., Methodology for roughness measurements and contact analysis for optimization of interface roughness, IEEE Trans. Magn. 32 (1996) 1819–1825 CrossRefGoogle Scholar
Delrio, F., De Boer, M.P., Knapp, J.A., Reedy, E.D., Clews, P.J., Dunn, M.L., The role of Van der Waals forces in adhesion of micromachined surfaces, Nat. Mater. 4 (2005) 629–632 CrossRefGoogle Scholar
Attard, P., Interaction and deformation of elastic bodies: origin of adhesion hysteresis, J. Phys. Chem. B 104 (2000) 10635–10641 CrossRefGoogle Scholar
D. Tabor, The Hardness and Strength of Metals, Oxford Clarendon Press, Oxford, 1951
Hu, Y.Z., Tonder, K., Simulation of 3D random surfaces by 2D digital filters and Fourier analysis, Int. J. Mach. Tools Manufact. 32 (1992) 83–90 CrossRefGoogle Scholar
Maboudian, R., Howe, R., Critical review: adhesion in surface micromechanical structures, J. Vac. Sci. Technol. B 15 (1997) 1–20 CrossRefGoogle Scholar
Ashurst, W.R., de Boer, M.P., Carraro, C., Maboudian, R., An investigation of sidewall adhesion in MEMS, Appl. Surf. Sci. 212-213 (2003) 735–741 CrossRefGoogle Scholar
Mastrangelo, C.H., Hsu, C.H., Mechanical stability and adhesion of microstructures under capillary forces – Part I: Basic Theory, J. Microelectromech. Syst. 2 (1993) 33–43 CrossRefGoogle Scholar
Mastrangelo, C.H., Hsu, C.H., Mechanical stability and adhesion of microstructures under capillary forces – Part II: Experiments, J. Microelectromech. Syst. 2 (1993) 44–55 CrossRefGoogle Scholar