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Nonlinear phenomena in nanomechanical resonators: mechanicalbehaviors and physical limitations

Published online by Cambridge University Press:  03 February 2011

Najib Kacem ,
Sébastien Baguet ,
Sébastien Hentz  and
Régis Dufour
Najib Kacem*
Affiliation:
CEA/LETI, MINATEC, 17 rue des Martyrs, 38054 Grenoble, France Université de Lyon, CNRS, INSA-Lyon, LaMCoS UMR 5259, 69621 Villeurbanne, France
Sébastien Baguet
Affiliation:
Université de Lyon, CNRS, INSA-Lyon, LaMCoS UMR 5259, 69621 Villeurbanne, France
Sébastien Hentz
Affiliation:
CEA/LETI, MINATEC, 17 rue des Martyrs, 38054 Grenoble, France
Régis Dufour
Affiliation:
Université de Lyon, CNRS, INSA-Lyon, LaMCoS UMR 5259, 69621 Villeurbanne, France
*
a Corresponding author:najib.kacem@insa-lyon.fr
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Abstract

In order to overcome the loss of performances issue when scaling resonant sensors down toNEMS, it proves extremely useful to study the behavior of resonators up to largedisplacements and hence high nonlinearities. A comprehensive nonlinear multiphysics modelbased on the Euler-Bernoulli equation which includes both mechanical and electrostaticnonlinearities in the case of a capacitive doubly clamped beam is presented. This purelyanalytical model captures all the nonlinear phenomena present in NEMS resonatorselectrostatically actuated including bistability, multistability which can lead to severalphysical limitations such as noise mixing, frequency stability deterioration as well asdynamic pull-in. Moreover, close-form expressions of the critical amplitudes and pull-indomain initiation amplitude are provided which can potentially serve for NEMS designers asquick design rules.

Keywords

NEMS resonatornonlinear dynamicscritical amplitudepull-inmixed behaviorRésonateur NEMSdynamique non-linéaireamplitude critiquepull-incomportement mixte
Type
Research Article
Information
Mechanics & Industry , Volume 11 , Issue 6: VCB (Vibrations, Chocs et Bruits) , November 2010 , pp. 521 - 529
Copyright
© AFM, EDP Sciences 2011

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