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X-ray diffraction study of thin film elasticity constants

Published online by Cambridge University Press:  24 March 2004

P. Villain ,
P.-O. Renault ,
P. Goudeau  and
K. E. Badawi
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Abstract

We have developed an original method allowing to determine the elasticity constants of thin crystalline films deposited on substrates, which combines X-ray diffraction and in situ tensile testing. This technique has been successfully applied to measure the Poisson's ratio in tungsten thin films (150 nm) and molybdenum sublayers (8 nm) of a Mo/Ni multilayer. This paper gives the principles and experimental requirements for the Young's modulus determination.

Type
Research Article
Information
Metallurgical Research & Technology , Volume 101 , Issue 2: Science et Génie des MatériauxContraintes résiduelles (suite) , February 2004 , pp. 97 - 102
Copyright
© La Revue de Métallurgie, 2004

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