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Effects on the amorphous Ga2O3 film surfaces by sub-IB-metal-nano-layers

Published online by Cambridge University Press:  25 January 2019

L. I. Juárez-Amador Open the ORCID record for L. I. Juárez-Amador [Opens in a new window] ,
M. Galván-Arellano ,
Y. M. Hernández-Rodríguez ,
J. A. Andraca-Adame ,
G. Romero-Paredes  and
R. Peña-Sierra
L. I. Juárez-Amador*
Affiliation:
Programa de Doctorado en Nanociencias y Nanotecnología, CINVESTAV-IPN, Av. Instituto Politécnico Nacional 2508, Ciudad de México, C.P.07360, México.
M. Galván-Arellano
Affiliation:
Department of Electrical Engineering, Solid State Electronic Section (SEES), CINVESTAV-IPN, Av. Instituto Politécnico Nacional 2508, Ciudad de México, C.P.07360, México.
Y. M. Hernández-Rodríguez
Affiliation:
Programa de Doctorado en Nanociencias y Nanotecnología, CINVESTAV-IPN, Av. Instituto Politécnico Nacional 2508, Ciudad de México, C.P.07360, México.
J. A. Andraca-Adame
Affiliation:
Instituto Politécnico Nacional, UPIIH, Carretera Pachuca-Actopan kilómetro 1+500, San Agustín Tlaxiaca, Hidalgo “Ciudad del conocimiento y la cultura”, México.
G. Romero-Paredes
Affiliation:
Department of Electrical Engineering, Solid State Electronic Section (SEES), CINVESTAV-IPN, Av. Instituto Politécnico Nacional 2508, Ciudad de México, C.P.07360, México.
R. Peña-Sierra
Affiliation:
Department of Electrical Engineering, Solid State Electronic Section (SEES), CINVESTAV-IPN, Av. Instituto Politécnico Nacional 2508, Ciudad de México, C.P.07360, México.
*
*(Email: ljuarezamador@gmail.com)
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Abstract

This work reports by the first time a method to control the geometry of Ga2O3 films nanocrystallites at 350 °C. The formation of controlled shaped nano-crystallites of γ-Ga2O3 from amorphous Ga2O3 films grown by RF-Sputtering at room temperature driven by nano-layers of group IB metals (Cu, Ag or Au) is studied. The reported results can be explained by the role of subsurface metal nano-layers and the non-equilibrium nature of the sputtering processes. To study the effects on the surface structure and their optical properties arrays of amorphous-Ga2O3/IB-metal/amorphous-Ga2O3 were annealed in dry N2 atmosphere at 350 °C by 50, 100 and 150 min. The experimental results can be explained by the evolution of the amorphous character of the films amorphous films towards the nanocrystalline γ-Ga2O3 phase driven by the metal nano-layer seed nature. As the annealing time was increased the transition from amorphous-Ga2O3 to the nanocrystalline γ-Ga2O3 phase was detected by X-ray diffraction analysis. The transition to the nanocrystalline γ-Ga2O3 is demonstrated by the formation of octahedral, triangle and ball shape nanocrystallites with sizes of ∼5 to 50 nm according to FE-SEM analysis. The influence of the metal nano-layer is clearly seen by the shift of the plasmon frequency resonance produced by the Ga2O3/IB-metal/Ga2O3 arrays in the region from 400 to 600 nm caused by the modification of the interface Ga2O3/IB-metal produced by the applied annealing stages.

Keywords

nanostructurescanning electron microscopy (SEM)semiconducting
Type
Articles
Information
MRS Advances , Volume 4 , Issue 5-6: Nanomaterials , 2019 , pp. 285 - 292
Copyright
Copyright © Materials Research Society 2019 

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