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Substrates with Programmable Heater Arrays for In-Situ Observation of Microstructural Evolution of Polycrystalline Films: Towards Real Time Control of Grain Growth

Published online by Cambridge University Press:  04 April 2016

Prabhu Balasubramanian ,
Chengjian Zheng ,
Yixuan Tan ,
Genevieve Kane ,
Antoinette Maniatty ,
John Wen  and
Robert Hull
Prabhu Balasubramanian
Affiliation:
Department of Materials Science and Engineering, Rensselaer Polytechnic Institute, 110 8th Street, Troy, NY 12180
Chengjian Zheng
Affiliation:
Department of Mechanical, Aerospace and Nuclear Engineering, Rensselaer Polytechnic Institute, 110 8th Street, Troy, NY 12180
Yixuan Tan
Affiliation:
Department of Mechanical, Aerospace and Nuclear Engineering, Rensselaer Polytechnic Institute, 110 8th Street, Troy, NY 12180
Genevieve Kane
Affiliation:
Department of Materials Science and Engineering, Rensselaer Polytechnic Institute, 110 8th Street, Troy, NY 12180
Antoinette Maniatty
Affiliation:
Department of Mechanical, Aerospace and Nuclear Engineering, Rensselaer Polytechnic Institute, 110 8th Street, Troy, NY 12180
John Wen
Affiliation:
Department of Industrial and Systems Engineering, Rensselaer Polytechnic Institute, 110 8th Street, Troy, NY 12180 Department of Electrical and Computer Systems Engineering, Rensselaer Polytechnic Institute, 110 8th Street, Troy, NY 12180
Robert Hull*
Affiliation:
Department of Materials Science and Engineering, Rensselaer Polytechnic Institute, 110 8th Street, Troy, NY 12180
*
*(Email: hullr2@rpi.edu)
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Abstract

An integrated experimental – simulation – control theory approach designed to enable adaptive control of microstructural evolution in polycrystalline metals is described. A micro-heater array, containing ten addressable channels, is used to create desired temperature profiles across thin polycrystalline films in situ to a scanning electron microscope (SEM). The goal is that on heating with controlled temperature profiles, the evolution of grain growth within the film can be continuously monitored and compared to Monte Carlo simulations of trajectories towards a desired microstructure. Feed-forward and feedback control strategies are then used to guide the microstructure along the desired trajectory.

Keywords

grain sizescanning electron microscopy (SEM)microstructure
Type
Articles
Information
MRS Advances , Volume 1 , Issue 26: Theory, Characterization, and Modeling , 2016 , pp. 1947 - 1952
Copyright
Copyright © Materials Research Society 2016 

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References

REFERENCES

Copper Applications Technology Roadmap. Inter Copper Assoc, Ltd. (New York,NY, 2011).Google Scholar
Aluminum Technology Roadmap. The Aluminum Association (Washington, DC, 2003).Google Scholar
https://www.whitehouse.gov/mgi (accessed on 01/04/16).Google Scholar
Wu, X. and Hull, R., Nanotechnology 23: 465707:1–7, 2012.Google Scholar
Darhuber, A.A., Troian, S.M. and Wagner, S., J. Appl. Phys. 91: 5686–92, 2002.CrossRefGoogle Scholar
Thompson, C.V., Ann. Rev. Mat. Sci. 20, 245–68 (2002)Google Scholar
Rollett, A.D., Brahme, A.P. and Roberts, C.G., Mat. Sci. For. 588-9, 33–42, 2007 Google Scholar
Anderson, M. P., Srolovitz, D. J., Grest, G. S., and Sahni, P. S., Acta Metall. 32:783–791, 1984.Google Scholar
Gao, J. and Thompson, R., Acta materialia, 44, 4565–70, 1996.Google Scholar
Gangulee, A., J. Appl. Phys. 45, 3749–56, 1974.CrossRefGoogle Scholar
Zheng, C., Tan, Y., Wen, J.T., and Maniatty, A.M., Proc. American Control Conference, Chicago, IL, p. 619–24 (IEEE, Piscataway, NJ, 2015)Google Scholar
Tan, Y., Zheng, C., Wen, J.T., Maniatty, A.M., Inverse Problems in Sci. & Eng, submitted.Google Scholar
Kasap, S.O., Principles of Electronic Materials & Devices, (2nd ed. McGraw-Hill), 2.3, 2002 Google Scholar
Day, M.E., Delfino, M., Fair, J.A., and Tsai, W., Thin Solid Films 254, 285–90 (1995)CrossRefGoogle Scholar