Hostname: page-component-cd9895bd7-fscjk Total loading time: 0 Render date: 2024-12-29T10:53:40.020Z Has data issue: false hasContentIssue false
  • English
  • Français

Subwavelength Grating Structure with High Aspect Ratio and Tapered Sidewall Profiles

Published online by Cambridge University Press:  28 December 2015

W. Yu ,
D. Wu ,
X. Duan  and
Y. Yi
W. Yu
Affiliation:
University of Michigan, MI
D. Wu
Affiliation:
University of Michigan, MI
X. Duan
Affiliation:
Massachusetts Institute of Technology, Cambridge, MA
Y. Yi*
Affiliation:
University of Michigan, MI Massachusetts Institute of Technology, Cambridge, MA
*
*e-mail: yys@alum.mit.edu
Get access

Abstract

CMOS-compatible fabrication and etching processes are often used in subwavelength grating structures manufacturing, it normally generates tapered sidewall profile of the gratings. In this work, we have studied the impacts on resonance mode characteristics of subwavelength grating structures due to the tapered sidewall profile, as well as grating with high aspect ratio. Our simulation results have revealed that both of these two factors play important roles on the resonance mode behavior of subwavelength grating devices. We also discussed the mechanism between the guided mode resonance and the grating cavity mode resonance. Our study will provide guidance for a series of integrated photonics devices applications, such as compact optical filter, photonics amplifier, and lasers, while the realistic subwavelength grating structure is considered.

Keywords

nanoscaleoptical propertiessemiconducting
Type
Articles
Information
MRS Advances , Volume 1 , Issue 23: Electronics and Photonics , 2016 , pp. 1693 - 1701
Copyright
Copyright © Materials Research Society 2015 

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

Hessel, A. and Oliner, A. A., “A new theory of Wood’s anomalies on optical gratings,” Appl. Opt., vol. 4, no. 10, pp. 1275–1297, Oct. 1965.Google Scholar
Wang, S. S., Magnusson, R., Bagby, J. S., and Moharam, M. G., “Guided- mode resonances in planar dielectric-layer diffraction gratings,” J. Opt. Soc. Amer. A, vol. 7, no. 8, pp. 1470–1474, Aug. 1990.CrossRefGoogle Scholar
Chang-Hasnain, C. J. and Yang, W., “High-contrast gratings for inte- grated optoelectronics,” Adv. Opt. Photon., vol. 4, no. 3, pp. 379–440, Sep. 2012.CrossRefGoogle Scholar
Mateus, C. F. R., Huang, M. C. Y., Deng, Y., Neureuther, A. R., and Chang-Hasnain, C. J., “Ultrabroadband mirror using low-index cladded subwavelength grating,” IEEE Photon. Technol. Lett., vol. 16, no. 2, pp. 518–520, Feb. 2004.CrossRefGoogle Scholar
Sturmberg, B. C. P., Dossou, K. B., Botten, L. C., McPhedran, R. C., and de Sterke, C. M., Opt. Exp., 23, A1672 (2015)Google Scholar
Liu, Z. S., Tibuleac, S., Shin, D., Young, P. P., and Magnusson, R., “High- efficiency guided-mode resonance filter,” Opt. Lett., vol. 23, no. 19, pp. 1556–1558, Oct. 1998.Google Scholar
Szeghalmi, A., Kley, E. B., and Knez, M., “Theoretical and experimental analysis of the sensitivity of guided mode resonance sensors,” J. Phys. Chem. C, vol. 114, no. 49, pp. 21150–21157, Dec. 2010.CrossRefGoogle Scholar
Lin, S. F. et al. , “A model for fast predicting and optimizing the sensitiv- ity of surface-relief guided mode resonance sensors,” Sens. Actuators B, Chem., vol. 176, no. 1, pp. 1197–1203, Jan. 2013.Google Scholar
Zhu, A. Y., Zhu, S., and Lo, G.-Q., “Guided mode resonance enabled ultra-compact germanium photodetector for 1.55 μm detection,” Opt. Exp., vol. 22, no. 3, pp. 2247–2258, Feb. 2014.Google Scholar
Lin, Y.-R., Lai, K. Y., Wang, H.-P., and He, J.-H., “Slope-tunable Si nanorod arrays with enhanced antireflection and self-cleaning proper- ties,” Nanoscale, vol. 2, no. 12, pp. 2765–2768, Dec. 2010.CrossRefGoogle Scholar
Wang, Y. et al. , “Biomimetic corrugated silicon nanocone arrays for self- cleaning antireflection coatings,” Nano Res., vol. 3, no. 7, pp. 520–527, Jul. 2010.Google Scholar
Crozier, K. B., Sundaramurthy, A., Kino, G. S., and Quate, C. F., “Optical antennas: Resonators for local field enhancement,” J. Appl. Phys., vol. 94, no. 7, pp. 4632–4642, Oct. 2003.CrossRefGoogle Scholar
Kabashin, A. V. et al. , “Plasmonic nanorod metamaterials for biosens- ing,” Nature Mater., vol. 8, no. 11, pp. 867–871, Oct. 2009.CrossRefGoogle Scholar