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A Three-Dimensional Atom Probe Microscope Incorporating a Wavelength-Tuneable Femtosecond-Pulsed Coherent Extreme Ultraviolet Light Source

Published online by Cambridge University Press:  03 July 2019

Ann N. Chiaramonti Open the ORCID record for Ann N. Chiaramonti [Opens in a new window] ,
Luis Miaja-Avila ,
Paul T. Blanchard ,
David R. Diercks ,
Brian P. Gorman  and
Norman A. Sanford
Ann N. Chiaramonti*
Affiliation:
National Institute of Standards and Technology, Boulder, CO, USA
Luis Miaja-Avila
Affiliation:
National Institute of Standards and Technology, Boulder, CO, USA
Paul T. Blanchard
Affiliation:
National Institute of Standards and Technology, Boulder, CO, USA
David R. Diercks
Affiliation:
Colorado School of Mines, Golden, CO, USA
Brian P. Gorman
Affiliation:
Colorado School of Mines, Golden, CO, USA
Norman A. Sanford
Affiliation:
National Institute of Standards and Technology, Boulder, CO, USA
*
*(Email: chiaramonti@nist.gov)
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Abstract

Pulsed coherent extreme ultraviolet (EUV) radiation is a potential alternative to pulsed near-ultraviolet (NUV) wavelengths for atom probe tomography. EUV radiation has the benefit of high absorption within the first few nm of the sample surface for elements across the entire periodic table. In addition, EUV radiation may also offer athermal field ion emission pathways through direct photoionization or core-hole Auger decay processes, which are not possible with the (much lower) photon energies used in conventional NUV laser-pulsed atom probe. We report preliminary results from what we believe to be the world’s first EUV radiation-pulsed atom probe microscope. The instrument consists of a femtosecond-pulsed, coherent EUV radiation source interfaced to a local electrode atom probe tomograph by means of a vacuum manifold beamline. EUV photon-assisted field ion emission (of substrate atoms) has been demonstrated on various insulating, semiconducting, and metallic specimens. Select examples are shown.

Keywords

atom probe microscopyinterfacefield emissionchemical compositionmass spectroscopy
Type
Articles
Information
MRS Advances , Volume 4 , Issue 44-45: Characterization, Processing and Theory , 2019 , pp. 2367 - 2375
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Copyright
Copyright © Materials Research Society 2019 

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References

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