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Information: MRS Bulletin , Volume 26 , Issue 7: Emerging Methods for Micro- and Nano-Fabrication Nanofabrication , July 2001 , pp. 584 - 588

DOI: https://doi.org/10.1557/mrs2001.151 [Opens in a new window]

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Volume 26, Issue 7
DOI: https://doi.org/10.1557/mrs2001.151

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