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Femtosecond laser direct writing in transparent materials based on nonlinear absorption

Published online by Cambridge University Press:  06 December 2016

Li Jia Jiang ,
Shoji Maruo ,
Roberto Osellame ,
Wei Xiong ,
John H. Campbell  and
Yong Feng Lu
Li Jia Jiang
Affiliation:
Department of Electrical and Computer Engineering, University of Nebraska–Lincoln, USA; li.jia.jiang1985@gmail.com
Shoji Maruo
Affiliation:
Department of Mechanical Engineering and Materials Science, Graduate School of Engineering, Yokohama National University, Japan; maruo@ynu.ac.jp
Roberto Osellame
Affiliation:
Institute for Photonics and Nanotechnologies, Italian National Research Council; and Department of Physics, Polytechnic University of Milan, Italy; roberto.osellame@polimi.it
Wei Xiong
Affiliation:
Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, China; weixiong@hust.edu.cn
John H. Campbell
Affiliation:
Material Science Solutions, Inc., USA; campbelljh@comcast.net
Yong Feng Lu
Affiliation:
Department of Electrical and Computer Engineering, University of Nebraska–Lincoln, USA; ylu2@unl.edu
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Abstract

Femtosecond laser direct writing (FsLDW) in transparent materials is a laser-based precise three-dimensional (3D) micro/nanofabrication method that has shown great potential for applications. The advantages of FsLDW originate in the nonlinear nature of absorption in the multiphoton absorption process. Over the past few years, transparent material micro/nanofabrication using FsLDW has seen several developments in materials and applications. Specifically, two-photon polymerization has been widely used as a precision direct-writing process for fabrication of polymeric 3D micro/nanostructures; internal/surface ablation of polymer 3D structures based on multiphoton absorption has been demonstrated and developed as a promising subtractive manufacturing technique; and femtosecond laser multiphoton modification in glass has been intensively studied for refractive-index change and generation of nanogratings and microvoids. This article describes the latest research on FsLDW in polymers and glasses with specific applications for large-dimension fabrication, microelectromechanical systems, microphotonics, and microfluidics.

Keywords

laserpolymerizationablationmicrostructure
Type
Research Article
Information
MRS Bulletin , Volume 41 , Issue 12: Ultrafast Laser Synthesis and Processing of Materials , December 2016 , pp. 975 - 983
Copyright
Copyright © Materials Research Society 2016 

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